发明授权
- 专利标题: Stacked capacitor construction
- 专利标题(中): 堆叠电容器结构
-
申请号: US58778申请日: 1993-04-28
-
公开(公告)号: US5300801A公开(公告)日: 1994-04-05
- 发明人: Guy Blalock , Phillip G. Wald
- 申请人: Guy Blalock , Phillip G. Wald
- 申请人地址: ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: ID Boise
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; H01L21/8242 ; H01L27/108 ; H01L29/78
摘要:
A method of forming a capacitor on a semiconductor wafer includes: a) in a dry etching reactor, selectively anisotropically dry etching a capacitor contact opening having a minimum selected open dimension into an insulating dielectric layer utilizing selected gas flow rates of a reactive gas component and an inert gas bombarding component, the flow rate of the bombarding component significantly exceeding the flow rate of the reactive component to effectively produce a capacitor contact opening having grooved striated sidewalls and thereby defining female capacitor contact opening striations; b) providing a layer of an electrically conductive storage node material within the striated capacitor contact opening; c) removing at least a portion of the conductive material layer to define an isolated capacitor storage node within the insulating dielectric having striated sidewalls; d) etching the insulating dielectric layer selectively relative to the conductive material sufficiently to expose at least a portion of the external male striated conductive material sidewalls; and e) providing conformal layers of capacitor dielectric and capacitor cell material atop the etched conductive material and over its exposed striated sidewalls. The invention also includes a stacked capacitor construction having an electrically conductive storage node with upwardly rising external sidewalls. Such sidewalls have longitudinally extending striations to maximize surface area and corresponding capacitance in a resulting construction.
公开/授权文献
- USD388466S Popcorn vending machine 公开/授权日:1997-12-30
信息查询
IPC分类: