Invention Grant
- Patent Title: Hot-cathode ionization pressure gauge including a sequence of electrodes arranged at a distance from one another in sequence along an axis
- Patent Title (中): 热阴极电离压力计包括沿着轴线依次彼此间隔设置的电极序列
-
Application No.: US866869Application Date: 1992-04-10
-
Publication No.: US5300890APublication Date: 1994-04-05
- Inventor: Guenter Haas
- Applicant: Guenter Haas
- Applicant Address: DEX Goettingen
- Assignee: Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
- Current Assignee: Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
- Current Assignee Address: DEX Goettingen
- Priority: DEX4112407 19910416
- Main IPC: G01L21/30
- IPC: G01L21/30 ; G01L21/32 ; H01J41/04
Abstract:
A hot cathode ionization pressure gauge with the following electrodes, arged at a distance from one another in the specified sequence along an axis:(a) a thermionic cathode filament which has a central active part and lateral support parts;(b) an essentially flat, diaphragm-like control electrode,(c) an essentially flat apertured acceleration electrode and(d) an essentially flat ion collector electrode,(e) a base plate on which the filament, the control electrode, the acceleration electrode and ion collector electrode are mounted,wherein the base plate consists of a ceramic material and has a plurality of through holes, and each of said control, acceleration and ion collector electrodes comprises a support member having essentially a shape of an inverted "U" with first and second legs, one of said legs of each electrode support member extending through a corresponding hole of said base plate and being fixed therein.
Information query