发明授权
- 专利标题: Surface acoustic wave device
- 专利标题(中): 表面声波装置
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申请号: US29514申请日: 1993-03-11
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公开(公告)号: US5302877A公开(公告)日: 1994-04-12
- 发明人: Takahiro Sato , Hidenori Abe
- 申请人: Takahiro Sato , Hidenori Abe
- 申请人地址: JPX Tokyo
- 专利权人: Nikko Kyodo Co. Ltd.
- 当前专利权人: Nikko Kyodo Co. Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX4-58306 19920316; JPX5-17663 19930204
- 主分类号: H03H9/25
- IPC分类号: H03H9/25 ; H03H9/02 ; H03H9/64 ; H01L41/08
摘要:
A surface acoustic wave device comprises lithium tetraborate single crystal substrate to make use of surface acoustic waves with higher propagation velocities and smaller propagation losses, whereby frequencies to be signal-processed can be as high as above 1 GHz. The surface acoustic wave device comprises a metal film formed on a surface of a lithium tetraborate single crystal substrate, the metal film being for exciting, receiving, reflecting and/or propagating surface acoustic waves, the metal film being so formed that a cut angle of the substrate, and a propagation direction of the surface acoustic waves are in an Eulerian angle representation of (39.degree.-51.degree., 66.degree.-114.degree., -20.degree.-20.degree.) and directions equivalent thereto. In this propagation direction few Rayleigh waves exit, and only surface acoustic waves of high propagation velocity are generated. Propagation losses can be eliminated.
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