Invention Grant
- Patent Title: Pressure micro-sensor
- Patent Title (中): 压力微传感器
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Application No.: US20081Application Date: 1993-02-19
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Publication No.: US5305643APublication Date: 1994-04-26
- Inventor: Isabelle Thomas , Pierre O. Lefort
- Applicant: Isabelle Thomas , Pierre O. Lefort
- Applicant Address: FRX Cedex
- Assignee: Sextant Avionique
- Current Assignee: Sextant Avionique
- Current Assignee Address: FRX Cedex
- Priority: FRX9202189 19920220
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L7/08 ; G01L11/00
Abstract:
A pressure micro-sensor is formed by a sandwich of three silicon plates in contact by their periphery, with an interposed insulating layer in order to define an internal cavity. The lower plate (2) includes a thinner region (21) forming a diaphragm, on its internal side. The intermediate plate (1) includes a peripheral region (11) forming a frame coupled to the upper and lower plates by a silicon oxide layer (24, 25), a first stud (13) mounted onto the thinner region of the lower plate, a second stud (14) mounted onto a thick region of the lower plate, and a silicon beam (15) forming a resonator and disposed between the upper surfaces of the first and second studs in front of the upper plate (3). A first electrode (32) is connected to the upper plate, a second electrode (33) is connected to the frame and a third electrode (31) is connected to the second stud.
Public/Granted literature
- US4311769A Mercury contact Public/Granted day:1982-01-19
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