公开(公告)号：US5381300A

公开(公告)日：1995-01-10

申请号：US20079

申请日：1993-02-19

Applicant: Isabelle Thomas ,  Pierre O. LeFort ,  Christophe Legoux

Inventor： Isabelle Thomas ,  Pierre O. LeFort ,  Christophe Legoux

IPC: G01L9/00 ,  G01P15/08 ,  G01P15/125

CPC classification number: G01P15/125 ,  G01L9/0073 ,  G01P15/0802 ,  G01P2015/0828

Abstract: A capacitive micro-sensor includes a sandwich of three silicon wafers, a peripheral stripe of each surface of the central plate being assembled to a corresponding stripe of an opposing external plate through an insulating layer. At least one of the external plates forms a first electrode, the central plate forms a second electrode and at least one portion of the central plate forms a variable capacity with at least one of the external layers. At least one of the insulating layers is formed by a sandwich of a first insulating layer, a conductive layer and a second insulating layer, the conductive layer being associated with connection means.

Abstract translation: 电容微传感器包括三个硅晶片的夹层，中心板的每个表面的周边条被组装成通过绝缘层的相对的外部板的对应条纹。 外部板中的至少一个形成第一电极，中心板形成第二电极，并且中心板的至少一部分与至少一个外部层形成可变容量。 绝缘层中的至少一个由第一绝缘层，导电层和第二绝缘层的夹层形成，导电层与连接装置相关联。

公开(公告)号：US5261277A

公开(公告)日：1993-11-16

申请号：US764320

申请日：1991-09-24

Applicant: Isabelle Thomas ,  Pierre O. Lefort

Inventor： Isabelle Thomas ,  Pierre O. Lefort

IPC: G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G01P15/18

CPC classification number: G01P15/18 ,  G01P15/0802 ,  G01P15/097

Abstract: A resonator micro-accelerometer sensitive to accelerations along a first direction comprises, between two supporting plates, an intermediate plate etched so as to include a rectangular frame, the sides of which extend along a first (x) and a second (y) direction perpendicular to the first one. The two directions are orthogonal to a third direction (z). A seismic mass is located inside the frame. Hanging rods extend between the frame and the mass along the second direction, on both sides of the mass. The rods have substantially the same thickness as the mass and the frame along the third direction and a small width along the first direction. Resonators extend between the frame and mass and have a small thickness along the third direction.

Abstract translation: 对沿着第一方向的加速度敏感的谐振器微加速度计包括在两个支撑板之间的中间板，该中间板被蚀刻以包括矩形框架，其侧面沿着第一（x）和第二（y）方向垂直 到第一个 两个方向与第三方向（z）正交。 地震块位于框架内部。 悬挂杆沿着第二方向在物体的两侧在框架和质量块之间延伸。 棒具有与质量和框架沿着第三方向大致相同的厚度，并且沿着第一方向具有小的宽度。 谐振器在框架和质量之间延伸并且沿着第三方向具有小的厚度。

公开(公告)号：US20050118920A1

公开(公告)日：2005-06-02

申请号：US10510385

申请日：2003-04-01

Applicant: Pierre-Olivier Lefort ,  Isabelle Thomas

Inventor： Pierre-Olivier Lefort ,  Isabelle Thomas

IPC: B81B7/00 ,  H01J9/00

CPC classification number: B81B7/0038 ,  B81C2201/0115

Abstract: The invention relates to a process for fabricating a microstructure containing a vacuum cavity. The invention includes producing, from a first silicon wafer, a porous silicon region intended to form, completely or partly, one wall of the cavity and capable of absorbing residual gases in the cavity and joins the first silicon wafer to a second wafer, so as to produce the cavity.

Abstract translation: 本发明涉及一种制造包含真空腔的微结构的方法。 本发明包括从第一硅晶片制造用于形成，完全或部分地形成空腔的一个壁的多孔硅区域，并且能够吸收空腔中的残余气体并将第一硅晶片连接到第二晶片，以便 以产生空腔。

公开(公告)号：US06251698B1

公开(公告)日：2001-06-26

申请号：US09424223

申请日：1999-11-23

Applicant: Olivier Lefort ,  Isabelle Thomas

Inventor： Olivier Lefort ,  Isabelle Thomas

IPC: H01L2100

CPC classification number: B81C1/0015 ,  B81B2201/0235 ,  B81C2201/053 ,  G01P15/0802 ,  G01P15/125

Abstract: A process for the production of microsensors machined in silicon, and in particular accelerometers for applications of assisting with navigation in aircraft, and pressure sensors. In order to improve the production of certain active parts of the sensor, and in particular of a beam forming a resonator, which needs to have well-controlled width and thickness characteristics, the following procedure is adopted. A beam having a thickness equal to the desired final thickness, and a width greater than the desired final width, is produced by micromachining the silicon on a first plate, the beam being covered on its upper face by a mask defining the desired final width. The plate is assembled with another plate. The two faces of the beam are oxidized in order to cover them with a thin protective layer. The thin protective layer on the upper face is removed, by vertical directional etching, without removing the mask already present. The silicon in the area exposed by the preceding operation is attacked by a vertical directional etch on the upper face, until the entire part of the beam not protected by the mask is eliminated, and the beam having the desired width is thus formed.

Abstract translation: 用于生产在硅中加工的微传感器的方法，特别是用于辅助航空器导航和压力传感器的加速度计。 为了改善传感器的某些有源部分的生产，特别是需要具有良好控制的宽度和厚度特性的形成谐振器的光束的生产，采用以下步骤。 具有等于​​期望最终厚度的厚度和大于期望最终宽度的宽度的光束通过在第一板上微加工硅而产生，所述光束通过限定所需最终宽度的掩模在其上表面上被覆盖。 板与另一块板组装。 梁的两个表面被氧化以便用薄的保护层覆盖它们。 通过垂直方向蚀刻去除上表面上的薄保护层，而不去除已经存在的掩模。 在前面的操作中暴露的区域中的硅被上面的垂直定向蚀刻所侵蚀，直到没有被掩模保护的光束的整个部分被消除，因此形成了所需宽度的光束。

公开(公告)号：US5146787A

公开(公告)日：1992-09-15

申请号：US732193

申请日：1991-07-19

Applicant: Isabelle Thomas ,  Pierre O. Lefort

Inventor： Isabelle Thomas ,  Pierre O. Lefort

IPC: G01L19/00 ,  G01L9/00 ,  H01L29/84

CPC classification number: G01L9/0019

Abstract: A pressure microsensor comprises, between two plates in an insulating material: a bottom silicon plate (3) forming a base; a middle silicon plate (2) constituting a diaphragm (11) surrounded by a frame (12), a first part (15) of a stud being formed at a decentred location of the diaphragm; and a top silicon plate (1) comprising a frame (17) corresponding to that of the middle plate, a second parts (16) of said stud and a silicon blade (18) constituting a resonator connecting the top of the stud to a high area of the frame. A measuring interval (13) is provided between the diaphragm and the bottom plate, this interval comprising an access (14, 28), and the two insulating plates (4, 5) cooperate with the border of the three assembled silicon plates to form a closed cavity.

Abstract translation: 压力微传感器包括在绝缘材料的两个板之间：形成基部的底部硅板（3） 构成由框架（12）围绕的隔膜（11）的中间硅板（2），在隔膜的偏心位置处形成有螺柱的第一部分（15） 以及顶部硅板（1），其包括与所述中间板相对应的框架（17），所述螺柱的第二部分（16）和构成将螺柱的顶部连接到高度的谐振器的硅片（18） 框架区域。 测量间隔（13）设置在隔膜和底板之间，该间隔包括通路（14,28），并且两个绝缘板（4,5）与三个组装的硅板的边界配合形成一个 封闭腔。

公开(公告)号：US5418681A

公开(公告)日：1995-05-23

申请号：US20086

申请日：1993-02-19

Applicant: Isabelle Thomas ,  Pierre O. Lefort ,  Christophe Legoux

Inventor： Isabelle Thomas ,  Pierre O. Lefort ,  Christophe Legoux

IPC: G01L9/00 ,  G01P15/08 ,  G01P15/125 ,  H01L21/78 ,  H01G7/00

CPC classification number: G01P15/125 ,  G01L9/0073 ,  G01P15/0802 ,  H01L21/78 ,  G01P2015/0828 ,  Y10T29/43

Abstract: A capacitive micro-sensor includes a sandwich of at least two silicon plates. A peripheral stripe of each side of one plate is assembled to a corresponding stripe of the opposing surface of an adjacent plate through an insulating layer. The lateral sides of the sandwich are provided with notches partially penetrating in each of the insulating layers, and are thicker than the thickness of the insulating layers.

Abstract translation: 电容式微传感器包括至少两个硅板的三明治。 一个板的每一侧的周边条纹通过绝缘层组装到相邻板的相对表面的相应条纹上。 三明治的侧面设置有在每个绝缘层中部分穿透的凹口，并且比绝缘层的厚度厚。

公开(公告)号：US5305643A

公开(公告)日：1994-04-26

申请号：US20081

申请日：1993-02-19

Applicant: Isabelle Thomas ,  Pierre O. Lefort

Inventor： Isabelle Thomas ,  Pierre O. Lefort

IPC: G01L9/00 ,  G01L7/08 ,  G01L11/00

CPC classification number: G01L9/0019

Abstract: A pressure micro-sensor is formed by a sandwich of three silicon plates in contact by their periphery, with an interposed insulating layer in order to define an internal cavity. The lower plate (2) includes a thinner region (21) forming a diaphragm, on its internal side. The intermediate plate (1) includes a peripheral region (11) forming a frame coupled to the upper and lower plates by a silicon oxide layer (24, 25), a first stud (13) mounted onto the thinner region of the lower plate, a second stud (14) mounted onto a thick region of the lower plate, and a silicon beam (15) forming a resonator and disposed between the upper surfaces of the first and second studs in front of the upper plate (3). A first electrode (32) is connected to the upper plate, a second electrode (33) is connected to the frame and a third electrode (31) is connected to the second stud.

Abstract translation: 压力微传感器由三个通过其周边接触的硅板的夹层形成，并具有插入的绝缘层，以便限定内部空腔。 下板（2）在其内侧包括形成隔膜的较薄区域（21）。 中间板（1）包括通过氧化硅层（24,25）形成连接到上板和下板的框架的周边区域（11），安装在下板较薄区域上的第一螺柱（13） 安装在下板的厚区域上的第二螺柱（14）和形成谐振器的硅梁（15），并设置在上板（3）前面的第一和第二螺柱的上表面之间。 第一电极（32）连接到上板，第二电极（33）连接到框架，第三电极（31）连接到第二螺柱。

公开(公告)号：US06311556B1

公开(公告)日：2001-11-06

申请号：US09424221

申请日：1999-11-23

Applicant: Olivier Lefort ,  Isabelle Thomas

Inventor： Olivier Lefort ,  Isabelle Thomas

IPC: G01P1510

CPC classification number: G01P15/097 ,  G01P1/006 ,  G01P1/023 ,  G01P2015/0828

Abstract: A micro-accelerometer having three micromachined conducting-silicon plates bonded in superposition with the interposition of insulating layers. The central plate includes a subassembly sensitive to acceleration, and a peripheral frame electrically insulated from the subassembly and surrounding the subassembly. The peripheral frame forms a spacer between a lower plate and an upper plate from which it is also electrically insulated. The subassembly includes a base fixed on the lower plate and a cantilevered proof mass suspended from the base, an electrical connection being made between the lower plate and the base of the subassembly. The suspension of the proof mass includes, on the one hand, a central vibrating beam which is connected to the proof mass and to the base and is placed substantially in the horizontal plane of an upper face of the proof mass and, on the other hand, two short side suspension arms which are connected to the base and are placed on either side of the central beam but in a horizontal plane passing substantially through the center of gravity of the proof mass. Such a micro-accelerometer may find application for an aircraft, in the context of assisting with inertial navigation.

Abstract translation: 具有三个微加工导电硅板的微加速度计，其与绝缘层的插入叠加。 中心板包括对加速度敏感的子组件和与子组件电绝缘并围绕子组件的外围框架。 外围框架在下板和上板之间形成间隔件，其也被电绝缘。 子组件包括固定在下板上的基座和从基座悬挂的悬臂式悬挂质量块，在下板与子组件底座之间形成电连接。 一方面，检测质量块的悬架包括一个中心振动梁，其连接到检​​验质量块和基部，并且基本上放置在校验块的上表面的水平面中，另一方面 两个短边悬架臂，它们连接到基座并且放置在中心梁的任一侧上，但是位于基本上穿过校验块的重心的水平面中。 这种微加速度计可以在协助惯性导航的上下文中找到飞机的应用。

公开(公告)号：US5352918A

公开(公告)日：1994-10-04

申请号：US20077

申请日：1993-02-19

Applicant: Isabelle Thomas ,  Pierre O. Lefort ,  Christophe Legoux

Inventor： Isabelle Thomas ,  Pierre O. Lefort ,  Christophe Legoux

IPC: G01L9/00 ,  G01P15/08 ,  G01P15/125 ,  H01L29/84 ,  H01L29/96

CPC classification number: G01L9/0073 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0828

Abstract: A capacitive micro-sensor includes a sandwich of three silicon plates, each surface of the frame region of the central plate being assembled to the opposing surface of each external plate through a thin layer forming an insulating stripe. At least one of the external plates forms a first electrode, and at least one central portion of the central plate forms a variable capacity with at least one of the external plates. The frame region of the central plate is electrically disconnected from the central portion. First contact means are coupled to the frame portion. Second contact means are coupled to the central portion and form a second electrode of the variable capacity.

Abstract translation: 电容式微传感器包括三个硅板的夹层，中心板的框架区域的每个表面通过形成绝缘条的薄层组装到每个外部板的相对表面。 外部板中的至少一个形成第一电极，并且中心板的至少一个中心部分与至少一个外部板形成可变容量。 中心板的框架区域与中心部分电气断开。 第一接触装置连接到框架部分。 第二接触装置联接到中心部分并形成可变容量的第二电极。