发明授权
- 专利标题： Method for producing high quality thin layer films on substrates
- 专利标题（中）： 在基材上生产高品质薄膜的方法
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申请号： US980496申请日： 1992-11-23
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公开(公告)号： US5306530A公开(公告)日： 1994-04-26
- 发明人: Myron Strongin , Mark Ruckman , Daniel Strongin
- 申请人： Myron Strongin , Mark Ruckman , Daniel Strongin
- 申请人地址： DC Washington
- 专利权人： Associated Universities, Inc.
- 当前专利权人： Associated Universities, Inc.
- 当前专利权人地址： DC Washington
- 主分类号： C23C16/46
- IPC分类号： C23C16/46 ; C23C16/48 ; B05D3/06
摘要：
A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate.
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