发明授权
US5317587A VCSEL with separate control of current distribution and optical mode
失效
VCSEL具有电流分布和光学模式的独立控制
- 专利标题: VCSEL with separate control of current distribution and optical mode
- 专利标题(中): VCSEL具有电流分布和光学模式的独立控制
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申请号: US925139申请日: 1992-08-06
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公开(公告)号: US5317587A公开(公告)日: 1994-05-31
- 发明人: Donald E. Ackley , Chan-Long Shieh
- 申请人: Donald E. Ackley , Chan-Long Shieh
- 申请人地址: IL Schaumburg
- 专利权人: Motorola, Inc.
- 当前专利权人: Motorola, Inc.
- 当前专利权人地址: IL Schaumburg
- 主分类号: H01S5/00
- IPC分类号: H01S5/00 ; H01S5/028 ; H01S5/042 ; H01S5/183 ; H01S5/323 ; H01S3/19
摘要:
A VCSEL formed on a substrate with an upper mirror stack etched to form a mesa shaped area with material positioned on the upper mirror stack including optically transparent, electrically conductive material defining an electrical contact window to control current distribution within the laser, and material positioned on the surface of the mesa shaped area with an optical thickness selected to provide a desired mirror reflectivity profile which controls the optical mode independently of the mesa edges, thereby, providing separate control of the current and the optical mode.
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