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US5319441A Method and apparatus for detecting wavelength of laser beam 失效
用于检测激光束波长的方法和装置

Method and apparatus for detecting wavelength of laser beam
摘要:
A laser light, whose wavelength is to be measured, is introduced into an etalon, a concentric circular interference stripe derived from the etalon is irradiated onto a one-dimensional photodetector array and a diameter of the interference stripe is measured to measure the wavelength of the laser light. Alternatively, if a reference laser light of known wavelength is introduced into the etalon, as described above, a wavelength measurement of extremely high accuracy can be made without being affected by positional deviations of the optical system.
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