发明授权
- 专利标题: Method and apparatus for detecting wavelength of laser beam
- 专利标题(中): 用于检测激光束波长的方法和装置
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申请号: US114287申请日: 1993-09-01
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公开(公告)号: US5319441A公开(公告)日: 1994-06-07
- 发明人: Mitsugu Terada , Ken Ohmata , Michito Uehara , Hideaki Shibata , Yasuo Oeda , Yuichiro Terashi
- 申请人: Mitsugu Terada , Ken Ohmata , Michito Uehara , Hideaki Shibata , Yasuo Oeda , Yuichiro Terashi
- 申请人地址: JPX Tokyo
- 专利权人: Mitsui Petrochemical Industries, Ltd.
- 当前专利权人: Mitsui Petrochemical Industries, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX2-143449 19900601
- 主分类号: G01J3/26
- IPC分类号: G01J3/26 ; G01J9/02 ; H01S3/00 ; G01B9/02
摘要:
A laser light, whose wavelength is to be measured, is introduced into an etalon, a concentric circular interference stripe derived from the etalon is irradiated onto a one-dimensional photodetector array and a diameter of the interference stripe is measured to measure the wavelength of the laser light. Alternatively, if a reference laser light of known wavelength is introduced into the etalon, as described above, a wavelength measurement of extremely high accuracy can be made without being affected by positional deviations of the optical system.
公开/授权文献
- US4307973A Road barrier 公开/授权日:1981-12-29