发明授权
- 专利标题： Laser-broken fuse
- 专利标题（中）： 激光断线保险丝
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申请号： US865681申请日： 1992-04-08
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公开(公告)号： US5321300A公开(公告)日： 1994-06-14
- 发明人: Yoshio Usuda , Hiroaki Itaba , Jumpei Kumagai , Seiji Kaki
- 申请人： Yoshio Usuda , Hiroaki Itaba , Jumpei Kumagai , Seiji Kaki
- 申请人地址： JPX Kawasaki
- 专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人地址： JPX Kawasaki
- 优先权： JPX2-116837 19900508
- 主分类号： H01L21/82
- IPC分类号： H01L21/82 ; H01L23/525 ; H01L27/02 ; H01L23/48
摘要：
In a laser-broken fuse used in a memory redundancy technique, an aluminum wiring layer is formed on an interlevel insulating film. A portion of the wiring layer is selected to be broken to shut off conduction of the layer. A polysilicon-made heat member is provided in the interlevel insulating film at the place which is underneath the selected portion. The heat member is located on a field insulating film. This heat member generates heat by absorbing energy from a laser beam, and thermal-explodes in a sealed atmosphere so as to break the selected portion.
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