发明授权
- 专利标题: Bonding apparatus and testing apparatus of a bonded portion
- 专利标题(中): 接合部的接合装置和检查装置
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申请号: US946627申请日: 1992-09-18
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公开(公告)号: US5323952A公开(公告)日: 1994-06-28
- 发明人: Mituo Kato , Ryoichi Kajiwara , Kazuya Takahashi , Setuo Sekine , Tokiyuki Seto
- 申请人: Mituo Kato , Ryoichi Kajiwara , Kazuya Takahashi , Setuo Sekine , Tokiyuki Seto
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX3-238272 19910918
- 主分类号: H01L21/607
- IPC分类号: H01L21/607 ; B23K20/10 ; H01L21/60 ; H01L21/66
摘要:
A bonding apparatus comprising a bonding tool, means for driving the bonding tool, means for detecting an amount of crushing of a bonding portion during bonding, means for calculating a rate of change of the amount of crushing detected by the amount-of-crushing detecting means, means for setting a target value, which is inputted from an external source, of the amount of crushing of the bonding portion, and means for controlling the driving means. When the rate of change of the amount of crushing calculated by the calculating means is smaller than a predetermined value, the controlling means compares the amount of crushing detected by the amount-of-crushing detecting means with the target value. When the amount of crushing detected by the amount-of-crushing detecting means is smaller than the target value, the controlling means discriminates that the bonding is being performed in a satisfactory manner and hence should be continued.
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