发明授权
- 专利标题: Projection optical apparatus
- 专利标题(中): 投影光学仪器
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申请号: US154997申请日: 1993-11-19
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公开(公告)号: US5337097A公开(公告)日: 1994-08-09
- 发明人: Kazuaki Suzuki , Yukio Kakizaki , Tetsuo Taniguchi
- 申请人: Kazuaki Suzuki , Yukio Kakizaki , Tetsuo Taniguchi
- 申请人地址: JPX Tokyo
- 专利权人: Nippon Kogaku K.K.
- 当前专利权人: Nippon Kogaku K.K.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX61-256986 19851226; JPX60-292286 19861030
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03B27/34
摘要:
A projection optical apparatus for projection an image of an object onto a workpiece, which is suitable for use, for example, as an exposure apparatus used in the manufacture of integrated circuits. The projection optical apparatus includes an image forming optical system whose optical characteristic is changed by the light energy supplied from the illuminated object. A change of the optical characteristic of the optical system is determined by the use of a predetermined parameter whereby when the distribution of the light energy on the pupil of the optical system is changed, the parameter is correct in such a manner that the change of the optical characteristic determined by the parameter is changed in correspondence to the change in the distribution of the light energy.
公开/授权文献
- US5951558A Bone fixation device 公开/授权日:1999-09-14
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