公开(公告)号：USRE37352E1

公开(公告)日：2001-09-04

申请号：US08687029

申请日：1996-07-25

申请人： Kazuaki Suzuki ,  Yukio Kakizaki ,  Tetsuo Taniguchi

发明人： Kazuaki Suzuki ,  Yukio Kakizaki ,  Tetsuo Taniguchi

IPC分类号： G03B2734

CPC分类号： G03F7/70058 ,  G03F7/70258 ,  G03F7/70883 ,  G03F7/70891

摘要： A projection optical apparatus for projection an image of an object onto a workpiece, which is suitable for use, for example, as an exposure apparatus used in the manufacture of integrated circuits. The projection optical apparatus includes an image forming optical system whose optical characteristic is changed by the light energy supplied from the illuminated object. A change of the optical characteristic of the optical system is determined by the use of a predetermined parameter whereby when the distribution of the light energy on the pupil of the optical system is changed, the parameter is correct in such a manner that the change of the optical characteristic determined by the parameter is changed in correspondence to the change in the distribution of the light energy.

摘要翻译： 一种用于将物体的图像投射到工件上的投影光学装置，其适用于例如用于制造集成电路的曝光装置。 投影光学装置包括其光学特性由从被照射物体供应的光能改变的成像光学系统。 通过使用预定参数来确定光学系统的光学特性的变化，由此当光学系统的光瞳上的光能的分布改变时，参数是正确的， 由参数确定的光学特性对应于光能分布的变化而改变。

公开(公告)号：US5337097A

公开(公告)日：1994-08-09

申请号：US154997

申请日：1993-11-19

申请人： Kazuaki Suzuki ,  Yukio Kakizaki ,  Tetsuo Taniguchi

发明人： Kazuaki Suzuki ,  Yukio Kakizaki ,  Tetsuo Taniguchi

IPC分类号： G03F7/20 ,  G03B27/34

CPC分类号： G03F7/70483 ,  G03F7/70058 ,  G03F7/70258 ,  G03F7/70883 ,  G03F7/70891

摘要： A projection optical apparatus for projection an image of an object onto a workpiece, which is suitable for use, for example, as an exposure apparatus used in the manufacture of integrated circuits. The projection optical apparatus includes an image forming optical system whose optical characteristic is changed by the light energy supplied from the illuminated object. A change of the optical characteristic of the optical system is determined by the use of a predetermined parameter whereby when the distribution of the light energy on the pupil of the optical system is changed, the parameter is correct in such a manner that the change of the optical characteristic determined by the parameter is changed in correspondence to the change in the distribution of the light energy.

摘要翻译： 一种用于将物体的图像投影到工件上的投影光学装置，其适用于例如用于制造集成电路的曝光装置。 投影光学装置包括其光学特性由从被照射物体供应的光能改变的成像光学系统。 通过使用预定参数来确定光学系统的光学特性的变化，由此当光学系统的光瞳上的光能的分布改变时，参数是正确的， 由参数确定的光学特性对应于光能分布的变化而改变。

公开(公告)号：US5137349A

公开(公告)日：1992-08-11

申请号：US633314

申请日：1990-12-24

申请人： Tetsuo Taniguchi ,  Kazuaki Suzuki ,  Toshihiko Tsuji ,  Masato Hatasawa

发明人： Tetsuo Taniguchi ,  Kazuaki Suzuki ,  Toshihiko Tsuji ,  Masato Hatasawa

IPC分类号： G03F7/20 ,  G03F7/207 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30

CPC分类号： G03F7/70883 ,  G03F7/70241 ,  G03F9/7023

摘要： In a projection-type optical apparatus in which a projection optical system projects an image of an object upon a substrate, a position detecting sensor mechanically connected to the projection optical system detects the position of the projection optical system relative to the substrate along the optical axis of the projection optical system. A displacement measuring device measures relative displacement between the position detecting sensor and the projection optical system along the optical axis. The substrate is brought into coincidence with an optimum image forming plane of the projection optical system on the basis of the position detected by the position detecting sensor and the displacement measured by the displacement measuring device.

摘要翻译： 在其中投影光学系统将物体的图像投射到基板的投影型光学装置中，机械地连接到投影光学系统的位置检测传感器沿着光轴检测投影光学系统相对于基板的位置 的投影光学系统。 位移测量装置测量沿着光轴的位置检测传感器和投影光学系统之间的相对位移。 基于由位置检测传感器检测到的位置和由位移测量装置测量的位移，使基板与投影光学系统的最佳图像形成平面一致。

公开(公告)号：US08018577B2

公开(公告)日：2011-09-13

申请号：US11437595

申请日：2006-05-19

申请人： Hajime Yamamoto ,  Tohru Isogami ,  Kazuaki Suzuki ,  Noriyuki Hirayanagi

发明人： Hajime Yamamoto ,  Tohru Isogami ,  Kazuaki Suzuki ,  Noriyuki Hirayanagi

IPC分类号： G03B27/54

CPC分类号： G03F7/7085 ,  G03F7/70516 ,  G03F7/70558

摘要： Exposure apparatus are disclosed that can control, to high precision, exposure doses on a photosensitive substrate of a mask pattern defined on a reflective mask as the pattern is being exposed on the substrate using a projection-optical system. An exemplary apparatus includes a first illumination sensor for detecting light that is incident on a reflective mask from an illumination system and a second illumination sensor for detecting light that has propagated from the illumination system to a reference reflective surface on the reflective mask, reflected from the reference reflective surface, and arrived at an image surface of the projection-optical system. Calibration of the first sensor is performed based on detection data obtained by the first sensor and detection data obtained by the second sensor. Exposure of the substrate is controlled based on the detection data obtained by the calibrated first sensor.

摘要翻译： 公开了一种曝光装置，其可以使用投影光学系统在图案被曝光在基板上的同时，在限定在反射掩模上的掩模图案的感光基板上高精度地控制曝光量。 示例性装置包括用于检测从照明系统入射到反射掩模上的光的第一照明传感器和用于检测从照明系统传播到反射掩模上的参考反射表面的光的第二照明传感器， 参考反射表面，并到达投影光学系统的图像表面。 基于由第一传感器获得的检测数据和由第二传感器获得的检测数据执行第一传感器的校准。 基于由校准的第一传感器获得的检测数据来控制基板的曝光。

公开(公告)号：US07812264B2

公开(公告)日：2010-10-12

申请号：US12230602

申请日：2008-09-02

申请人： Yoshihiro Yoneda ,  Takahiro Asada ,  Kazuaki Suzuki

发明人： Yoshihiro Yoneda ,  Takahiro Asada ,  Kazuaki Suzuki

IPC分类号： H01L23/28

CPC分类号： H01L27/14618 ,  H01L31/0203 ,  H01L33/52 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49175 ,  H01L2224/8592 ,  H01L2924/01004 ,  H01L2924/01079 ,  H01L2924/1461 ,  H01L2924/1815 ,  H01S5/02296 ,  H01S5/32341 ,  Y10T29/49007 ,  Y10T29/4913 ,  Y10T29/49144 ,  Y10T29/49146 ,  H01L2924/00014 ,  H01L2924/00

摘要： A functional element-mounted module can be decreased in size and requires no costly and special members for a light transition member. A substrate is used, on which an optical functional element having an optical function part and bonding pads therearound is mounted by wire bonding, with an upper face of the element upward. A bank to dam a liquid sealing resin is provided around the optical functional element on the substrate, and the liquid sealing resin is dropped and filled between the optical functional element and the bank such that the bonding pads and partial gold wires for the wire bonding are exposed. A package-component member having a hole corresponding to the optical functional element is abutted to the bank such that the hole is opposed to the function part of the functional element. Thereby, the package-component member is contacted to the liquid sealing resin. The package-component member is fixed to the substrate by curing the liquid sealing resin, and the bank is cut away.

公开(公告)号：US20100175247A1

公开(公告)日：2010-07-15

申请号：US12659740

申请日：2010-03-19

申请人： Yoshihiro Yoneda ,  Takahiro Asada ,  Kazuaki Suzuki

发明人： Yoshihiro Yoneda ,  Takahiro Asada ,  Kazuaki Suzuki

IPC分类号： H05K3/34

CPC分类号： H01L27/14618 ,  H01L31/0203 ,  H01L33/52 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49175 ,  H01L2224/8592 ,  H01L2924/01004 ,  H01L2924/01079 ,  H01L2924/1461 ,  H01L2924/1815 ,  H01S5/02296 ,  H01S5/32341 ,  Y10T29/49007 ,  Y10T29/4913 ,  Y10T29/49144 ,  Y10T29/49146 ,  H01L2924/00014 ,  H01L2924/00

摘要： A functional element-mounted module can be decreased in size and requires no costly and special members for a light transition member. A substrate is used, on which an optical functional element having an optical function part and bonding pads therearound is mounted by wire bonding, with an upper face of the element upward. A bank to dam a liquid sealing resin is provided around the optical functional element on the substrate, and the liquid sealing resin is dropped and filled between the optical functional element and the bank such that the bonding pads and partial gold wires for the wire bonding are exposed. A package-component member having a hole corresponding to the optical functional element is abutted to the bank such that the hole is opposed to the function part of the functional element. Thereby, the package-component member is contacted to the liquid sealing resin. The package-component member is fixed to the substrate by curing the liquid sealing resin, and the bank is cut away.

摘要翻译： 功能元件安装模块的尺寸可以减小，并且不需要用于光过渡构件的昂贵且特殊的构件。 使用其上具有光学功能部分的光学功能元件和其周围的接合焊盘的基板通过引线接合安装，元件的上表面向上。 在基板上的光功能元件的周围设置有用于防止液体密封树脂的堤坝，并且液体密封树脂在光学功能元件和堤岸之间落下并填充，使得用于引线接合的接合焊盘和部分金线是 裸露。 具有与光功能元件相对应的孔的封装构件构件抵接于堤，使得孔与功能元件的功能部分相对。 由此，封装构件与液体密封树脂接触。 通过固化液体密封树脂将包装组分构件固定到基底上，并且切割堤。

公开(公告)号：US20090038843A1

公开(公告)日：2009-02-12

申请号：US12230602

申请日：2008-09-02

申请人： Yoshihiro Yoneda ,  Takahiro Asada ,  Kazuaki Suzuki

发明人： Yoshihiro Yoneda ,  Takahiro Asada ,  Kazuaki Suzuki

IPC分类号： H01L23/28 ,  H05K7/00

CPC分类号： H01L27/14618 ,  H01L31/0203 ,  H01L33/52 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/49175 ,  H01L2224/8592 ,  H01L2924/01004 ,  H01L2924/01079 ,  H01L2924/1461 ,  H01L2924/1815 ,  H01S5/02296 ,  H01S5/32341 ,  Y10T29/49007 ,  Y10T29/4913 ,  Y10T29/49144 ,  Y10T29/49146 ,  H01L2924/00014 ,  H01L2924/00

摘要： A functional element-mounted module can be decreased in size and requires no costly and special members for a light transition member. A substrate is used, on which an optical functional element having an optical function part and bonding pads therearound is mounted by wire bonding, with an upper face of the element upward. A bank to dam a liquid sealing resin is provided around the optical functional element on the substrate, and the liquid sealing resin is dropped and filled between the optical functional element and the bank such that the bonding pads and partial gold wires for the wire bonding are exposed. A package-component member having a hole corresponding to the optical functional element is abutted to the bank such that the hole is opposed to the function part of the functional element. Thereby, the package-component member is contacted to the liquid sealing resin. The package-component member is fixed to the substrate by curing the liquid sealing resin, and the bank is cut away.

摘要翻译： 功能元件安装模块的尺寸可以减小，并且不需要用于光过渡构件的昂贵且特殊的构件。 使用其上具有光学功能部分的光学功能元件和其周围的接合焊盘的基板通过引线接合安装，元件的上表面向上。 在基板上的光功能元件的周围设置有用于防止液体密封树脂的堤坝，并且液体密封树脂在光学功能元件和堤岸之间落下并填充，使得用于引线接合的接合焊盘和部分金线为 裸露。 具有与光功能元件相对应的孔的封装构件构件抵接于堤，使得孔与功能元件的功能部分相对。 由此，封装构件与液体密封树脂接触。 通过固化液体密封树脂将包装组分构件固定到基底上，并且切割堤。

公开(公告)号：US07314499B2

公开(公告)日：2008-01-01

申请号：US10468110

申请日：2002-02-26

申请人： Yoshihiro Hirata ,  Yoshio Ueda ,  Hiroaki Takase ,  Kazuaki Suzuki

发明人： Yoshihiro Hirata ,  Yoshio Ueda ,  Hiroaki Takase ,  Kazuaki Suzuki

IPC分类号： B22F9/04

CPC分类号： B22F1/0022 ,  A01N59/16 ,  A23L33/16 ,  A23V2002/00 ,  A61L9/01 ,  B22F9/12 ,  B22F2998/00 ,  B82Y30/00 ,  C02F1/68 ,  C02F2103/02 ,  C02F2103/026 ,  A01N25/04 ,  A01N2300/00 ,  A23V2250/154 ,  A23V2250/1568

摘要： Produce high-function water useful for consumption as healthy drinking water or in the production of health supplements, cosmetic products, food preservatives, freshness-keeping agents for food, insect repellents or deodorizers, wherein such water contains micro-dispersed ultra-fine gold particles and a small amount of dissolved gold and is produced by constructing in the upper section of a high-pressure water tank a combustion chamber equipped with an injector nozzle for oxygen-hydrogen mixture gas, an ignition device and a gold-rod or gold-wire feeder, igniting the injector nozzle for oxygen-hydrogen mixture gas using the ignition device in the combustion chamber to melt and evaporate the gold rod or wire supplied from the feeder or water in which gold foil was dispersed beforehand and to allow the produced gold vapor to contact high-pressure water, and thereby causing the produced ultra-fine gold particles to float and disperse in water.

摘要翻译： 生产用作健康饮用水或生产保健品，化妆品，食品防腐剂，食品保鲜剂，驱虫剂或除臭剂的高功能水，其中这种水含有微分散的超细金颗粒 和少量的溶解金，并且通过在高压水箱的上部构造具有配备有用于氧 - 氢混合气体的喷射器喷嘴的燃烧室，点火装置和金棒或金线 使用燃烧室中的点火装置点燃用于氧 - 氢混合气体的喷射器喷嘴，以熔融并蒸发从进料器提供的金棒或丝线，其中预先分散有金箔的水，并允许产生的金蒸汽 接触高压水，从而使生成的超细金颗粒漂浮并分散在水中。

公开(公告)号：US20060290916A1

公开(公告)日：2006-12-28

申请号：US11437595

申请日：2006-05-19

申请人： Hajime Yamamoto ,  Tohru Isogami ,  Kazuaki Suzuki ,  Noriyuki Hirayanagi

发明人： Hajime Yamamoto ,  Tohru Isogami ,  Kazuaki Suzuki ,  Noriyuki Hirayanagi

IPC分类号： G03B27/32

CPC分类号： G03F7/7085 ,  G03F7/70516 ,  G03F7/70558

摘要： Exposure apparatus are disclosed that can control, to high precision, exposure doses on a photosensitive substrate of a mask pattern defined on a reflective mask as the pattern is being exposed on the substrate using a projection-optical system. An exemplary apparatus includes a first illumination sensor for detecting light that is incident on a reflective mask from an illumination system and a second illumination sensor for detecting light that has propagated from the illumination system to a reference reflective surface on the reflective mask, reflected from the reference reflective surface, and arrived at an image surface of the projection-optical system. Calibration of the first sensor is performed based on detection data obtained by the first sensor and detection data obtained by the second sensor. Exposure of the substrate is controlled based on the detection data obtained by the calibrated first sensor.

摘要翻译： 公开了一种曝光装置，其可以使用投影光学系统在图案被曝光在基板上的同时，在限定在反射掩模上的掩模图案的感光基板上高精度地控制曝光量。 示例性装置包括用于检测从照明系统入射到反射掩模上的光的第一照明传感器和用于检测从照明系统传播到反射掩模上的参考反射表面的光的第二照明传感器， 参考反射表面，并到达投影光学系统的图像表面。 基于由第一传感器获得的检测数据和由第二传感器获得的检测数据执行第一传感器的校准。 基于由校准的第一传感器获得的检测数据来控制基板的曝光。

公开(公告)号：US20060080190A1

公开(公告)日：2006-04-13

申请号：US11237861

申请日：2005-09-29

申请人： Isao Furukawa ,  Shoichi Nakagami ,  Takashi Yanagita ,  Hirohisa Shimonaga ,  Junichi Matsuda ,  Kazuaki Suzuki

发明人： Isao Furukawa ,  Shoichi Nakagami ,  Takashi Yanagita ,  Hirohisa Shimonaga ,  Junichi Matsuda ,  Kazuaki Suzuki

IPC分类号： G06Q99/00

CPC分类号： G06Q10/08 ,  G06Q10/087

摘要： The present invention provides a goods trace information storing method comprising the steps of: acquiring identification information from an RFID (Radio Frequency Identifier) tag in each distribution level by an identification information read mechanism, and acquiring physical property information of goods, where the RFID tag is attached, by a physical quantity measurement mechanism; a comparison determination mechanism's comparing the physical property information with predetermined threshold information and outputting determination information comprising information for indicating whether or not the physical property information is out of a range of the threshold information; and a registration mechanism's making the acquired identification information, physical property information, and determination information correspond to information for identifying the information group, including information for specifying an acquisition time and an acquired distribution level, and storing them in a memory mechanism.

摘要翻译： 本发明提供了一种货物追踪信息存储方法，其特征在于包括以下步骤：通过识别信息读取机构从每个分发级别的RFID（射频标识符）标签获取识别信息，并且获取货物的物理属性信息，其中RFID标签 通过物理量测量机制; 比较确定机构将物理属性信息与预定阈值信息进行比较，并输出包括用于指示物理属性信息是否在阈值信息的范围之外的信息的确定信息; 以及登记机构使获取的识别信息，物理属性信息和确定信息对应于用于识别信息组的信息，包括用于指定获取时间和获取的分配级别的信息，并将其存储在存储机构中。