发明授权
- 专利标题： Optical detecting system wtih self-correction
- 专利标题（中）： 光学检测系统自校正
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申请号： US922059申请日： 1992-07-29
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公开(公告)号： US5337140A公开(公告)日： 1994-08-09
- 发明人: Takashi Hagiwara , Toyoki Kanzaki , Dainichiro Kinoshita
- 申请人： Takashi Hagiwara , Toyoki Kanzaki , Dainichiro Kinoshita
- 申请人地址： JPX Kyoto
- 专利权人： Horiba, Ltd.
- 当前专利权人： Horiba, Ltd.
- 当前专利权人地址： JPX Kyoto
- 优先权： JPX3-212845 19910730
- 主分类号： G01B11/24
- IPC分类号： G01B11/24 ; G01B11/30 ; G01N21/88 ; G01N21/94 ; G01N21/956 ; G03F1/84 ; H01L21/66 ; G01N21/00
摘要：
A laser beam particle-detecting apparatus can automatically detect the position of minute particles on a substrate. A laser beam can be scanned across the substrate, and optical detectors can optically detect the laser beam after incidence with the substrate to define the position of any minute particles. Correction factors characteristic of the laser beam particle-detecting apparatus can be utilized to adjust the coordinates of the particle position, whereby any inaccuracies in the detecting apparatus can be compensated.
公开/授权文献
- US6012825A Defect highlighting luminaire and inspection area 公开/授权日：2000-01-11
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