发明授权
- 专利标题: Spindrier
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申请号: US46986申请日: 1993-04-16
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公开(公告)号: US5339539A公开(公告)日: 1994-08-23
- 发明人: Hirofumi Shiraishi , Yoshiyuki Honda
- 申请人: Hirofumi Shiraishi , Yoshiyuki Honda
- 申请人地址: JPX Tokyo JPX Tosu
- 专利权人: Tokyo Electron Limited,Tokyo Electron Saga Limited
- 当前专利权人: Tokyo Electron Limited,Tokyo Electron Saga Limited
- 当前专利权人地址: JPX Tokyo JPX Tosu
- 优先权: JPX4-122718 19920416; JPX4-122719 19920416; JPX4-277811 19920922; JPX5-44027 19930304; JPX5-44028 19930304
- 主分类号: F26B5/08
- IPC分类号: F26B5/08 ; H01L21/00 ; F26B17/24
摘要:
A spindrier according to the present invention includes a box body enclosing a plurality of wafers, a rotor for holding the wafers in the box body and rotated by a motor, and upper and lower clamp bars for holding the wafers face to face with their faces directed perpendicular to rotating shafts of the rotor. The lower clamp bars are connected and fixed to the rotating shafts so as to hold lower rim portions of the wafers thereon when the wafers are set in the rotor. The upper clamp bars are connected to one of the rotating shafts at their base ends so that they can be swung vertically erect and also and horizontally relative to the rotating shaft and they are locked to the other rotating shaft at their front ends when they are swung horizontally. They include a mechanism for swinging them, a locking mechanism for locking their front ends to the other rotating shaft, and an unlocking mechanism for releasing their front ends from the other rotating shaft.
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