发明授权
- 专利标题: Process for producing a metal organic polymer combination
- 专利标题(中): 金属有机聚合物组合的制造方法
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申请号: US61815申请日: 1993-05-13
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公开(公告)号: US5340451A公开(公告)日: 1994-08-23
- 发明人: Leena P. Buchwalter , Stephen L. Buchwalter , Charles R. Davis , Ronald D. Goldblatt , John E. Heidenreich, III , Sharon L. Nunes , Jae M. Park , Richard R. Thomas , Domenico Tortorella , Luis M. Ferreiro, deceased
- 申请人: Leena P. Buchwalter , Stephen L. Buchwalter , Charles R. Davis , Ronald D. Goldblatt , John E. Heidenreich, III , Sharon L. Nunes , Jae M. Park , Richard R. Thomas , Domenico Tortorella , Luis M. Ferreiro, deceased
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: C23C18/22
- IPC分类号: C23C18/22 ; H05K1/03 ; H05K3/18 ; H05K3/38 ; B01D3/00
摘要:
A process is disclosed for producing a metal-organic polymer combination by contacting the polymer with a plasma followed by an aqueous solution of a metal salt. In one embodiment a water or nitrous oxide plasma is used to treat a polyimide or a fluorinated polymer. The polymer is combined with a metal cation, the metal being a catalyst for a conventional electroless coating after which it is contacted with an electroless metal plating bath for the formation of electrical circuits and especially for plating high aspect ratio vias in microcircuits. Unlike the conventional electroless process, the cationic catalytic metal is not reduced to a zero valent metal catalyst prior to the application of the electroless metal coating solution.The process also improves the wettability of the polymer, especially the fluorinated polymer and is especially useful in improving the wettability of high aspect ratio vias.
公开/授权文献
- USD390257S Inkjet printer 公开/授权日:1998-02-03
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