发明授权
- 专利标题: Force transducer
- 专利标题(中): 力传感器
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申请号: US995826申请日: 1992-12-23
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公开(公告)号: US5341688A公开(公告)日: 1994-08-30
- 发明人: Takeshi Morikawa , Kouji Tsukada , Yutaka Nonomura , Yoshiteru Omura
- 申请人: Takeshi Morikawa , Kouji Tsukada , Yutaka Nonomura , Yoshiteru Omura
- 申请人地址: JPX Aichi
- 专利权人: Kabushiki Kaisha Toyota Chuo Kenkyusho
- 当前专利权人: Kabushiki Kaisha Toyota Chuo Kenkyusho
- 当前专利权人地址: JPX Aichi
- 优先权: JPX3-113507[U] 19911226
- 主分类号: G01L1/18
- IPC分类号: G01L1/18 ; H01L29/84 ; G01L1/16
摘要:
A force transducer comprises: an N-type silicon single crystal having a crystal face of (110) on which a force is applied; a pair of first electrodes and a pair of second electrodes mounted on the crystal face of (110) of the N-type silicon single crystal, the first electrodes facing in a direction angularly spaced by 135 degrees from a direction of of the crystal, and the second electrodes being angularly spaced by 90 degrees from the first electrodes, one of the pairs of first and second electrodes being adapted to serve as input electrodes and the other being adapted to serve as output electrodes; a force transmission block connected to the crystal face of (110) of the N-type silicon single crystal for transmitting the force perpendicularly to the crystal face; and a support bed supporting the N-type silicon single crystal and connected to the N-type silicon single crystal at a face opposite to the crystal face to which the force transmission block is connected, the support bed being in the form of a planar structure having a horizontal cross-sectional shape with a short axis and a long axis.
公开/授权文献
- US5877673A Electric component with soldering -less terminal structure 公开/授权日:1999-03-02
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