发明授权
- 专利标题： Variable RF power splitter
- 专利标题（中）： 可变RF功率分配器
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申请号： US140338申请日： 1993-10-22
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公开(公告)号： US5349313A公开(公告)日： 1994-09-20
- 发明人: Kenneth S. Collins , John R. Trow , Craig A. Roderick
- 申请人： Kenneth S. Collins , John R. Trow , Craig A. Roderick
- 申请人地址： CA Santa Clara
- 专利权人： Applied Materials Inc.
- 当前专利权人： Applied Materials Inc.
- 当前专利权人地址： CA Santa Clara
- 主分类号： H03H7/48
- IPC分类号： H03H7/48 ; H03H11/30 ; H03H7/38
摘要：
A variable RF power splitter including three serially connected inductors (14, 15, 16) powered by an RF power source (11, 12). Two loads (17, 18), between which the RF power is to be split, are connected to ground from two different points in the inductance string. A variable reactance (19) connected to ground from another point in the inductance string controls the RF power splitting.
公开/授权文献
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