Impedance adjustment device and impedance adjustment method

    公开(公告)号:US11552612B2

    公开(公告)日:2023-01-10

    申请号:US17123637

    申请日:2020-12-16

    发明人: Tatsuya Morii

    IPC分类号: H03H7/38 H03H11/30 H01J37/32

    摘要: A high frequency power supply alternately outputs a first AC voltage and a second AC voltage to a plasma generator. The amplitudes of the first AC voltage and the second AC voltage are different from each other. An impedance adjustment device is disposed in midway of the transmission line of the first AC voltage and the second AC voltage. When the AC voltage output from the high frequency power supply is switched to a first AC voltage, a microcomputer changes the capacitance of a variable capacitor circuit to a first target value. When the AC voltage output from the high frequency power supply is switched to a second AC voltage, the microcomputer changes the capacitance of the variable capacitor circuit to a second target value.

    Impedance Adjustment Device and Impedance Adjustment Method

    公开(公告)号:US20210203300A1

    公开(公告)日:2021-07-01

    申请号:US17123637

    申请日:2020-12-16

    发明人: Tatsuya Morii

    IPC分类号: H03H7/38 H03H11/30

    摘要: A high frequency power supply alternately outputs a first AC voltage and a second AC voltage to a plasma generator. The amplitudes of the first AC voltage and the second AC voltage are different from each other. An impedance adjustment device is disposed in midway of the transmission line of the first AC voltage and the second AC voltage. When the AC voltage output from the high frequency power supply is switched to a first AC voltage, a microcomputer changes the capacitance of a variable capacitor circuit to a first target value. When the AC voltage output from the high frequency power supply is switched to a second AC voltage, the microcomputer changes the capacitance of the variable capacitor circuit to a second target value.

    Automatic Impedance Matching System, Method And Apparatus

    公开(公告)号:US20200343873A1

    公开(公告)日:2020-10-29

    申请号:US16844791

    申请日:2020-04-09

    申请人: Palstar, Inc.

    摘要: Automatic impedance matching measures the RF source frequency and RF load voltage, current and phase to determine a single match solution for a capacitive value of the variable capacitor and an inductive value for the variable inductor, and whether a shunt reactance is coupled to the RF source or RF load. Once the capacitance and inductance values for a match solution are determined they are contemporaneously selected without any iterative searching necessary for the match solution.

    Wireless power transmitter
    6.
    发明授权

    公开(公告)号:US10250076B2

    公开(公告)日:2019-04-02

    申请号:US15458971

    申请日:2017-03-15

    发明人: Jun Chen Yan Liu

    摘要: A wireless power transmitter that supplies power to a load. The wireless power transmitter includes an inverter, a voltage phase detector, a current phase detector, a phase difference counter, a controller and an impedance tuning circuit. The phase difference counter counts a phase difference between the voltage phase and the current phase at the output port of the inverter. The controller receives the phase difference from the phase difference counter and generates a control signal that changes an output impedance of the inverter in response to changes of a varying impedance of the load that is coupled with the output port of the inverter wirelessly. The impedance tuning circuit receives the control signal from the controller and tunes an imaginary part of the output impedance of the inverter to zero in order to maximize a power transfer efficiency from the wireless power transmitter to the load.

    RESISTANCE CALIBRATION CIRCUIT AND DEVICE
    7.
    发明申请

    公开(公告)号:US20180138895A1

    公开(公告)日:2018-05-17

    申请号:US15694550

    申请日:2017-09-01

    IPC分类号: H03H11/30 G05F3/26

    CPC分类号: H03H11/30 G05F3/262

    摘要: The present invention discloses a resistance calibration circuit. An embodiment of the resistance calibration circuit includes: a reference voltage outputting circuit operable to output a reference voltage; an adjustable internal resistor including at least one positive temperature coefficient resistor and at least one negative temperature coefficient resistor; a reference current generating circuit operable to generate an internal resistor reference current according to the reference voltage and the internal resistor and generate an external resistor reference current according to the reference voltage and an external resistor; and a comparison and control circuit operable generate a comparison result according to the internal and external resistor reference currents, and adjust the internal resistor according to the comparison result till the comparison result indicates that the difference between the internal and external resistor reference currents is less than a predetermined threshold or unable to be further reduced.

    METHOD AND APPARATUS FOR ADAPTIVE IMPEDANCE MATCHING

    公开(公告)号:US20170294891A1

    公开(公告)日:2017-10-12

    申请号:US15629820

    申请日:2017-06-22

    摘要: A system that incorporates teachings of the present disclosure may include, for example, an adaptive impedance matching network having an RF matching network coupled to at least one RF input port and at least one RF output port and comprising one or more controllable variable reactive elements. The RF matching network can be adapted to reduce a level of reflected power transferred from said at least one input port by varying signals applied to said controllable variable reactive elements. The one or more controllable variable reactive elements can be coupled to a circuit adapted to map one or more control signals that are output from a controller to a signal range that is compatible with said one or more controllable variable reactive elements. Additional embodiments are disclosed.