发明授权
US5354732A Pyroelectric IR sensor using an oxide superconductor upper electrode 失效
使用氧化物超导体上电极的热释电红外传感器

Pyroelectric IR sensor using an oxide superconductor upper electrode
摘要:
An electrode in an electronic device using a functional thin film facilitates epitaxial growth during the functional material film-forming process and prevents the generation of cracks due to thermal stress. An oxide superconductor is using as an electrode material, thereby forming the crystal structure identical with the crystal structure of a functional thin film, and rendering their lattice constant and coefficient of thermal expansion close to the lattice constant and coefficient of thermal expansion functional thin film. According to the electrode material, high electric conductivity, low thermal conductivity and large thermal absorption coefficient characteristics can also be obtained.
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