发明授权
US5354732A Pyroelectric IR sensor using an oxide superconductor upper electrode
失效
使用氧化物超导体上电极的热释电红外传感器
- 专利标题: Pyroelectric IR sensor using an oxide superconductor upper electrode
- 专利标题(中): 使用氧化物超导体上电极的热释电红外传感器
-
申请号: US997187申请日: 1992-12-28
-
公开(公告)号: US5354732A公开(公告)日: 1994-10-11
- 发明人: Hitoshi Tabata , Osamu Murata , Junzo Fujioka , Shunichi Minakata , Tomoji Kawai , Shichio Kawai
- 申请人: Hitoshi Tabata , Osamu Murata , Junzo Fujioka , Shunichi Minakata , Tomoji Kawai , Shichio Kawai
- 申请人地址: JPX Hyogo
- 专利权人: Kawasaki Jukogyo Kabushiki Kaisha
- 当前专利权人: Kawasaki Jukogyo Kabushiki Kaisha
- 当前专利权人地址: JPX Hyogo
- 优先权: JPX3-361439 19911227
- 主分类号: G01J5/34
- IPC分类号: G01J5/34 ; H01L37/02 ; H01L39/02 ; H01L39/22 ; H01L41/09 ; G01J5/00 ; H01L39/00
摘要:
An electrode in an electronic device using a functional thin film facilitates epitaxial growth during the functional material film-forming process and prevents the generation of cracks due to thermal stress. An oxide superconductor is using as an electrode material, thereby forming the crystal structure identical with the crystal structure of a functional thin film, and rendering their lattice constant and coefficient of thermal expansion close to the lattice constant and coefficient of thermal expansion functional thin film. According to the electrode material, high electric conductivity, low thermal conductivity and large thermal absorption coefficient characteristics can also be obtained.