发明授权
- 专利标题： Process for filtering electrically charged particles and energy filter
- 专利标题（中）： 过滤带电粒子和能量过滤器的过程
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申请号： US983398申请日： 1992-11-30
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公开(公告)号： US5365064A公开(公告)日： 1994-11-15
- 发明人: Gerhard Rettinghaus
- 申请人： Gerhard Rettinghaus
- 申请人地址： LIX Balzers
- 专利权人： Balzers Aktiengesellschaft
- 当前专利权人： Balzers Aktiengesellschaft
- 当前专利权人地址： LIX Balzers
- 优先权： CHX3536/91-4 19911202
- 主分类号： H01J49/22
- IPC分类号： H01J49/22 ; H01J27/20 ; H01J49/14 ; H01J49/48 ; H01J47/00 ; H01J49/00
摘要：
At an energy filter ions are deflected at the entrance side through a first electrostatic field between electrodes (3a', 3b'), traverse through a field-free volume (15) and enter through a shielding (11) into a further electrostatic deflection field between electrodes (7a', 3b'). The axes (A.sub.E, A.sub.A) of the beam entrance and exit are aligned and off-set with respect to the rotation axis (A'.sub.Z) of the cylinder forming the outermost electrode (7a').
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