发明授权
- 专利标题： Aerosol cleaning method
- 专利标题（中）： 气溶胶清洗方法
-
申请号： US76064申请日： 1993-06-14
-
公开(公告)号： US5372652A公开(公告)日： 1994-12-13
- 发明人: Kris V. Srikrishnan , Jin J. Wu
- 申请人： Kris V. Srikrishnan , Jin J. Wu
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 主分类号： B08B5/02
- IPC分类号： B08B5/02 ; B08B7/00 ; B08B7/02 ; B24C1/00 ; B24C3/22 ; B24C3/32 ; B24C5/04 ; H01L21/00 ; H01L21/304 ; B08B5/00
摘要：
An aerosol cleaning apparatus for cleaning a substrate includes an aerosol producing means having a nozzle head. The nozzle head is positioned at a selected proximity and orientation to the substrate which is held by a rotatable holder. The aerosol spray dislodges particles from the substrate and the rotation of the substrate further assists in the removal of the loosened particles. A method of aerosol cleaning includes rotating a substrate at a preselected speed and spraying an aerosol jet in conjunction with the rotation to help in the removal of particles from the substrate.
公开/授权文献
信息查询
IPC分类:
