- 专利标题: Non-volatile semiconductor memory cell
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申请号: US132942申请日: 1993-10-07
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公开(公告)号: US5373465A公开(公告)日: 1994-12-13
- 发明人: Ling Chen , Tien-ler Lin , Albert Wu
- 申请人: Ling Chen , Tien-ler Lin , Albert Wu
- 申请人地址: CA Sunnyvale
- 专利权人: Integrated Silicon Solution, Inc.
- 当前专利权人: Integrated Silicon Solution, Inc.
- 当前专利权人地址: CA Sunnyvale
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L27/115 ; H01L29/788 ; G11C11/34 ; G11C7/00
摘要:
Disclosed is a flash EEPROM cell needing only a 5 volt external source using an on-chip voltage multiplier circuit to provide high voltages necessary to effect Fowler-Nordheim tunneling during both the program and erase modes. Properties of dielectric layers between a floating gate and a control gate and between the floating gate and a drain region differ to facilitate programming and erasing of the floating gate. Also disclosed is a method for producing a flash EEPROM cell by forming the insulative layer between a floating gate and a control gate to have a capacitance lower than the capacitance of the insulating layer between the floating gate and a drain region.
公开/授权文献
- US6014893A Test fixture 公开/授权日:2000-01-18
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