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US5374580A Method of forming high density DRAM having increased capacitance area due to trench etched into storage capacitor region 失效
形成由于沟槽蚀刻到存储电容器区域中而增加的电容面积的高密度DRAM的方法

Method of forming high density DRAM having increased capacitance area
due to trench etched into storage capacitor region
摘要:
A dynamic one-transistor read/write memory cell employs a trench capacitor to increase the magnitude of the stored charge. The trench is etched into the silicon surface at a diffused N+ capacitor region similar in structure to the N+ bit line, then thick oxide is grown over the bit line and over the capacitor region, but not in the trench. The upper plate of the capacitor is a polysilicon layer extending into the trench and also forming field plate isolation over the face of the silicon bar. A refractory metal word line forms the gate of the access transistor at a hole in the polysilicon field plate.
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