发明授权
- 专利标题： Vacuum chuck
- 专利标题（中）： 真空吸盘
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申请号： US231785申请日： 1994-04-25
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公开(公告)号： US5374829A公开(公告)日： 1994-12-20
- 发明人: Eiji Sakamoto , Ryuichi Ebinuma , Shinichi Hara , Mitsuji Marumo
- 申请人： Eiji Sakamoto , Ryuichi Ebinuma , Shinichi Hara , Mitsuji Marumo
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX2-115741 19900507; JPX3-094377 19910424
- 主分类号： C30B25/12
- IPC分类号： C30B25/12 ; C30B31/14 ; H01L21/683 ; H01J37/20
摘要：
A wafer holding device of the vacuum attraction type includes a structural member having a protrusion for supporting a wafer and elastic members made of a material having an elasticity modulus smaller than that of the wafer and that of the structural member. The elastic members are distributed on a wafer attraction plane of the structural member.
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