发明授权
- 专利标题： Multichamber coating apparatus
- 专利标题（中）： 多室涂装置
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申请号： US39865申请日： 1993-03-30
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公开(公告)号： US5382126A公开(公告)日： 1995-01-17
- 发明人: Klaus Hartig , Joachim Szczyrbowski
- 申请人： Klaus Hartig , Joachim Szczyrbowski
- 申请人地址： DEX Hanau
- 专利权人： Leybold AG
- 当前专利权人： Leybold AG
- 当前专利权人地址： DEX Hanau
- 优先权： DEX4210346 19920330; DEX4303462 19930206
- 主分类号： C23C14/56
- IPC分类号： C23C14/56 ; C23C16/54 ; B65G49/06 ; C23C17/00
摘要：
A transport car open at the top and supported on rollers moves a substrate from a first coating chamber to a second coating chamber separated by a gate 7 running transversely of the direction of movement of the transport car 5. The gate 7 is formed of an upper gate part 8 and a lower gate part 9 forming a slot 10 which is adaptable to the cross section of the car. A cover associated with the top gate part and parallel to the direction of movement has an area greater than the car in order to minimize gas transfer between chambers.
公开/授权文献
- USD370230S Combined sunglasses with protection mask 公开/授权日：1996-05-28