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US5397739A Method for accurate growth of vertical-cavity surface-emitting lasers 失效
垂直腔表面发射激光器的精确生长方法

Method for accurate growth of vertical-cavity surface-emitting lasers
摘要:
We report a method for accurate growth of vertical-cavity surface-emitting lasers (VCSELs). The method uses a single reflectivity spectrum measurement to determine the structure of the partially completed VCSEL at a critical point of growth. This information, along with the extracted growth rates, allows imprecisions in growth parameters to be compensated for during growth of the remaining structure, which can then be completed with very accurate critical dimensions. Using this method, we can now routinely grow lasing VCSELs with Fabry-Perot cavity resonance wavelengths controlled to within 0.5%.
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