发明授权
US5399460A Negative photoresists containing aminoacrylate salts 失效
含有氨基丙烯酸盐的负性光致抗蚀剂

Negative photoresists containing aminoacrylate salts
摘要:
Negative photoresists, and electronic devices comprising dielectric polyimide films resulting from such photoresists. The Photoresists comprise polyamic acids, which have been neutralized with tertiary amines containing double bonds of the acrylic family, the amines including acrylamines, alkylacrylamines such as for example methacrylamines, ethacrylamines, and the like. Also methods of making such amines in high purity.
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