发明授权
- 专利标题: Negative photoresists containing aminoacrylate salts
- 专利标题(中): 含有氨基丙烯酸盐的负性光致抗蚀剂
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申请号: US803311申请日: 1991-12-04
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公开(公告)号: US5399460A公开(公告)日: 1995-03-21
- 发明人: Paul E. Aldrich , Philip Manos , Allan E. Nader
- 申请人: Paul E. Aldrich , Philip Manos , Allan E. Nader
- 申请人地址: DE Wilmington
- 专利权人: E. I. Du Pont de Nemours and Company
- 当前专利权人: E. I. Du Pont de Nemours and Company
- 当前专利权人地址: DE Wilmington
- 主分类号: G03F7/038
- IPC分类号: G03F7/038 ; G03C1/73
摘要:
Negative photoresists, and electronic devices comprising dielectric polyimide films resulting from such photoresists. The Photoresists comprise polyamic acids, which have been neutralized with tertiary amines containing double bonds of the acrylic family, the amines including acrylamines, alkylacrylamines such as for example methacrylamines, ethacrylamines, and the like. Also methods of making such amines in high purity.
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