发明授权
- 专利标题: Charged-particle beam exposure method
- 专利标题(中): 带电粒子束曝光方法
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申请号: US138219申请日: 1993-10-20
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公开(公告)号: US5399872A公开(公告)日: 1995-03-21
- 发明人: Hiroshi Yasuda , Junichi Kai , Hisayasu Nishino , Soichiro Arai , Yoshihisa Oae
- 申请人: Hiroshi Yasuda , Junichi Kai , Hisayasu Nishino , Soichiro Arai , Yoshihisa Oae
- 申请人地址: JPX Kawasaki
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX4-281877 19921020
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; H01J37/04 ; H01J37/317 ; H01L21/027 ; H01J37/302
摘要:
A charged-particle beam exposure method is used for a charged-particle beam exposure apparatus equipped with a blanking aperture array plate in which columns are arranged side by side in a first direction, and each of the columns includes a plurality of blanking apertures arranged in a second direction substantially perpendicular to the first direction, a charged-particle beam being moved on a wafer in the first direction. The method includes the steps of (a) determining one of first and second axes of a pattern to be exposed to be a priority axis; (b) projecting an image of the blanking aperture array plate onto the wafer so that the priority axis is perpendicular to the second direction; and (c) deflecting the charged-particle beam so that the wafer is scanned in the direction of the priority axis.
公开/授权文献
- US4873943A Milk flow indicator 公开/授权日:1989-10-17
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