发明授权
- 专利标题: Optoelectronic semiconductor device with mesa
- 专利标题(中): 光电半导体器件与台面
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申请号: US19223申请日: 1993-02-18
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公开(公告)号: US5408105A公开(公告)日: 1995-04-18
- 发明人: Hideo Adachi , Kenichi Matsuda
- 申请人: Hideo Adachi , Kenichi Matsuda
- 申请人地址: JPX Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX4-031670 19920219; JPX4-044409 19920302
- 主分类号: H01S5/026
- IPC分类号: H01S5/026 ; H01S5/183 ; H01S5/42 ; H01L33/00
摘要:
There are disclosed a low driving voltage surface emitting semiconductor laser and an optoelectronic integrated which comprises a two-dimensional array of such surface emitting semiconductor lasers which are modulatable with input signals of small voltage amplitudes. In an embodiment of the present invention, an optical semiconductor device includes a GaAs substrate 105, and an epitaxial growth layer structure on the GaAs substrate, the epitaxial growth layer structure including in the named order a p type GaAs/AlAs multilayer semiconductor mirror layer 104, an active layer 103 and an n type GaAs/AlAs multilayer semiconductor mirror layer 102. The epitaxial growth layer structure is etched to the depth of the active layer in forming a mesa, while the p type mirror layer remains unetched throughout a top surface of the semiconductor substrate.
公开/授权文献
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