发明授权
- 专利标题: Projection exposure method and apparatus with focus detection
- 专利标题(中): 具有焦点检测的投影曝光方法和装置
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申请号: US86984申请日: 1993-07-07
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公开(公告)号: US5412214A公开(公告)日: 1995-05-02
- 发明人: Hiroyuki Suzuki , Osamu Furukawa
- 申请人: Hiroyuki Suzuki , Osamu Furukawa
- 申请人地址: JPX Tokyo
- 专利权人: Nikon Corporation
- 当前专利权人: Nikon Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX4-182051 19920709
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03F7/207 ; G03F9/00 ; H01L21/027 ; H01L21/30 ; G01N21/86
摘要:
A projection exposure method and apparatus are disclosed, which can perform a focusing operation with respect to a partly omitted shot exposed at a peripheral portion of a photosensitive substrate such as a wafer. In the projection exposure method and apparatus, when a prohibition band having a predetermined width is set from the edge of the substrate, and exposure is to be performed with respect to a shot area having a portion located only within the prohibition band and the remaining portion located outside the edge of the substrate, a focus detection point is shifted to the boundary line of the prohibition band on the substrate, and a focusing operation is performed. Thereafter, the focus detection point is moved to an original target shot exposure position to perform exposure.
公开/授权文献
- US4298330A Curved mandrel for curing polymeric hose and method 公开/授权日:1981-11-03
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