发明授权
US5418771A Information processing apparatus provided with surface aligning mechanism between probe head substrate and recording medium substrate 失效
信息处理装置,在探头头基板和记录介质基板之间具有表面对准机构

Information processing apparatus provided with surface aligning
mechanism between probe head substrate and recording medium substrate
摘要:
An information processing apparatus includes first, second and third upper electrodes provided on a first substrate, and first, second and third lower electrodes provided on a second substrate opposed to the first, second and third upper electrodes, respectively. Also provided are first, second and third detectors for detecting a first capacitance between the first upper and lower electrodes, a second capacitance between the second upper and lower electrodes and a third capacitance between the third upper and lower electrodes. In addition, the apparatus also includes a first driver for moving the first and second substrates relative to each other in a first direction with respect to the substrate surfaces, a second driver for moving the first and second substrates relative to each other in a second direction perpendicular to the first direction, a third driver for rotating the first and second substrates relative to each other about an axis in a third direction perpendicular to the first and second directions, and a control unit.
公开/授权文献
信息查询
0/0