发明授权
- 专利标题: Information processing apparatus provided with surface aligning mechanism between probe head substrate and recording medium substrate
- 专利标题(中): 信息处理装置,在探头头基板和记录介质基板之间具有表面对准机构
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申请号: US201430申请日: 1994-02-24
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公开(公告)号: US5418771A公开(公告)日: 1995-05-23
- 发明人: Yuji Kasanuki , Katsunori Hatanaka , Toshihiko Miyazaki , Kunihiro Sakai , Haruki Kawada , Tsutomi Ikeda , Ryo Kuroda , Takehiko Kawasaki , Akihiko Yamano , Masahiro Tagawa
- 申请人: Yuji Kasanuki , Katsunori Hatanaka , Toshihiko Miyazaki , Kunihiro Sakai , Haruki Kawada , Tsutomi Ikeda , Ryo Kuroda , Takehiko Kawasaki , Akihiko Yamano , Masahiro Tagawa
- 申请人地址: JPX Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX5-037029 19930225; JPX5-115892 19930518
- 主分类号: G01B7/31
- IPC分类号: G01B7/31 ; G01Q10/02 ; G11B9/00 ; G01N21/86
摘要:
An information processing apparatus includes first, second and third upper electrodes provided on a first substrate, and first, second and third lower electrodes provided on a second substrate opposed to the first, second and third upper electrodes, respectively. Also provided are first, second and third detectors for detecting a first capacitance between the first upper and lower electrodes, a second capacitance between the second upper and lower electrodes and a third capacitance between the third upper and lower electrodes. In addition, the apparatus also includes a first driver for moving the first and second substrates relative to each other in a first direction with respect to the substrate surfaces, a second driver for moving the first and second substrates relative to each other in a second direction perpendicular to the first direction, a third driver for rotating the first and second substrates relative to each other about an axis in a third direction perpendicular to the first and second directions, and a control unit.
公开/授权文献
- US4937791A High performance dynamic ram interface 公开/授权日:1990-06-26
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