发明授权
US5421723A Sequential step belt furnace with individual concentric cooling elements
失效
具有单独同心冷却元件的顺序步带式炉
- 专利标题： Sequential step belt furnace with individual concentric cooling elements
- 专利标题（中）： 具有单独同心冷却元件的顺序步带式炉
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申请号： US218105申请日： 1994-03-25
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公开(公告)号： US5421723A公开(公告)日： 1995-06-06
- 发明人: Robert P. Katz , William W. Olah , William B. Roberts
- 申请人： Robert P. Katz , William W. Olah , William B. Roberts
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 主分类号： F27D15/02
- IPC分类号： F27D15/02 ; F27D19/00 ; H01L21/00 ; H01L21/677
摘要：
This invention relates generally to a belt type furnace. More specifically, this invention relates to a belt type furnace that sequentially stops the belt at the vicinity of at least one cooling unit, and where the cooling unit comprises at least two cooling elements. The furnace also allows the cooling of parts in such a way that the part cools uniformly.
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