发明授权
- 专利标题: Method for manufacturing a TFT panel
- 专利标题(中): TFT面板的制造方法
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申请号: US993036申请日: 1992-12-18
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公开(公告)号: US5422293A公开(公告)日: 1995-06-06
- 发明人: Naohiro Konya
- 申请人: Naohiro Konya
- 申请人地址: JPX Tokyo
- 专利权人: Casio Computer Co., Ltd.
- 当前专利权人: Casio Computer Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX3-355634 19911224; JPX3-355635 19911224
- 主分类号: G02F1/1362
- IPC分类号: G02F1/1362 ; H01L21/77 ; H01L21/84 ; H01L21/98
摘要:
A TFT panel is manufactured by a process of forming an oxide voltage-apply lines, gate lines, and capacitor lines on an insulating substrate, and a process of forming thin-film transistors, pixel electrodes, data lines, and ground lines. In a state that one end of the gate line and both ends of the capacitor line are connected to the oxide voltage-apply line, oxide films are formed on the surfaces of the gate line and the capacitor line by anodization. After forming the oxide film, the gate line and the capacitor line are electrically separated from the oxide voltage-apply line.
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