发明授权
US5424536A Substrate internal defect and external particle detecting apparatus
using s-polarized and p-polarized light
失效
基板内部缺陷和使用s偏振和p偏振光的外部粒子检测装置
- 专利标题： Substrate internal defect and external particle detecting apparatus using s-polarized and p-polarized light
- 专利标题（中）： 基板内部缺陷和使用s偏振和p偏振光的外部粒子检测装置
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申请号： US216190申请日： 1994-03-22
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公开(公告)号： US5424536A公开(公告)日： 1995-06-13
- 发明人: Kazuo Moriya
- 申请人： Kazuo Moriya
- 申请人地址： JPX Tokyo
- 专利权人： Mitsui Mining & Smelting Co., Ltd.
- 当前专利权人： Mitsui Mining & Smelting Co., Ltd.
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX5-090594 19930326
- 主分类号： G01N21/88
- IPC分类号： G01N21/88 ; G01N21/956 ; H01L21/66 ; G02F1/01
摘要：
A defect estimating apparatus includes a laser radiating unit For obliquely radiating laser light on a surface to be observed of an object to be inspected, an observing unit for observing, through the surface to be observed, scattered light produced From internal defects or particles of the object by refracted light of the laser light, and observing scattered light or reflected light produced from flaws or particles on the surface by tile laser light, and a component separating unit for allowing the observing unit to perform observation by using both light containing primarily a p-polarized light component of the laser light and light containing primarily an s-polarized light component of the laser light.