公开(公告)号：US20080111992A1

公开(公告)日：2008-05-15

申请号：US11883510

申请日：2006-02-03

Applicant: Kazuo Moriya

Inventor： Kazuo Moriya

IPC: G01N15/02

CPC classification number: G01B11/0608 ,  G01N15/1463 ,  G01N21/8806 ,  G01N2015/1452 ,  H01L22/10

Abstract: A defective particle measuring apparatus that irradiates focused laser light on a sample, images scattered light from the sample, and measures defective particles in the sample based on the image result, includes a position deviation computing portion which, based on an in-plane intensity distribution of scattered light of each defective particle that is imaged, obtains a deviation from a focal point position on an image point side of the scattered light of each defective particle and calculates a position deviation amount in a depth direction of the defective particle corresponding to the deviation from the focal point position, a light intensity correcting portion for correcting the light intensity of the scattered light of the defective particle corresponding to the position deviation amount in the depth direction, and a size determining portion for determining the defective particle size based on the light intensity corrected by the light intensity correcting portion. Thus, the size of the defective particles can be determined at a high precision by a simple constitution in a short time, and density distribution of the defective particles can be obtained.

Abstract translation: 一种有缺陷的粒子测量装置，其将聚焦的激光照射在样本上，对来自样品的散射光进行成像，并且基于图像结果测量样品中的有缺陷的颗粒，包括：位置偏差计算部，其基于面内强度分布 对每个有缺陷粒子的散射光的散射光进行成像，得到与各缺陷粒子的散射光的像点侧的焦点位置的偏差，并计算与该偏差对应的有缺陷粒子的深度方向的位置偏差量 从焦点位置，用于校正与深度方向上的位置偏差量相对应的有缺陷粒子的散射光的光强度的光强度校正部分和用于基于光线确定缺陷粒径的尺寸确定部分 强度由光强度校正部分校正。 因此，可以通过简单的结构在短时间内以高精度确定有缺陷的颗粒的尺寸，并且可以获得缺陷颗粒的密度分布。

公开(公告)号：US06236056B1

公开(公告)日：2001-05-22

申请号：US09161943

申请日：1998-09-28

Applicant: Kazuo Moriya

Inventor： Kazuo Moriya

IPC: G01N2186

CPC classification number: G01N21/94

Abstract: A defect evaluation apparatus of this invention includes a laser irradiation unit for obliquely irradiating a laser beam onto an object, and an observation unit for observing scattered light from inside the object or a surface of the object. The laser irradiation unit irradiates the laser beam onto the object from a plurality of incident directions around an observation optical axis, and the observation unit receives the scattered light from the object to obtain shape information of a defect in the object or on the surface of the object.

Abstract translation: 本发明的缺陷评估装置包括：用于将激光束倾斜照射到物体上的激光照射单元和用于观察物体或物体表面内的散射光的观察单元。 激光照射单元从围绕观察光轴的多个入射方向将激光照射到物体上，并且观察单元接收来自物体的散射光，以获得物体中或在该物体的表面上的缺陷的形状信息 目的。

公开(公告)号：US5978082A

公开(公告)日：1999-11-02

申请号：US14069

申请日：1998-01-27

Applicant: Yasushi Terui ,  Kazuo Moriya ,  Hiromi Yamashita ,  Hayato Tobe

Inventor： Yasushi Terui ,  Kazuo Moriya ,  Hiromi Yamashita ,  Hayato Tobe

IPC: G01N21/31 ,  G01J3/42 ,  G01N21/74

CPC classification number: G01J3/42

Abstract: The object of this invention is to provide an atomic absorptiometer and a metal specimen atomic vapor generation apparatus used in the atomic absorptiometer, which enable a light absorption measurement based on the Zeeman effect highly capable of background correction and eliminate the need for the troublesome work of dismounting a magnet. For this purpose, the following configuration is employed. First, the specimen, hydrochloric acid, and sodium borohydride are delivered and mixed by the peristaltic pump 10 to produce a metallic hydride. The generated gas-liquid mixture solution is separated by the separator 12 into a specimen gas and liquids. The separated specimen gas is introduced into the heating section 30. Electricity is supplied from the power source 28 to the specimen heating section 30 where the specimen gas introduced is heated and separated into hydrogen and a specimen metal vapor to be measured. The specimen metal vapor is then introduced into the measuring section 34 arranged between magnetic poles of the magnet 32 where the metal vapor is subjected to the atomic absorptiometric analysis based on the Zeeman effect.

Abstract translation: 本发明的目的是提供一种在原子吸收光谱仪中使用的原子吸收光谱仪和金属试样原子蒸汽发生装置，其能够基于能够进行背景校正的塞曼效应的光吸收测量，并且不需要麻烦的工作 拆下磁铁 为此，采用以下配置。 首先，将试样，盐酸和硼氢化钠通过蠕动泵10输送并混合，制成金属氢化物。 所产生的气液混合溶液被分离器12分离成样品气体和液体。 将分离的试样气体引入加热部30.从电源28向被加热的试样气体加热并分离为氢的试样加热部30供给被测定的试样金属蒸气。 然后将样品金属蒸气引入到测量部分34中，该测量部分34布置在磁体32的磁极之间，金属蒸气基于塞曼效应进行原子吸收分析。

公开(公告)号：US5424536A

公开(公告)日：1995-06-13

申请号：US216190

申请日：1994-03-22

Applicant: Kazuo Moriya

Inventor： Kazuo Moriya

IPC: G01N21/88 ,  G01N21/956 ,  H01L21/66 ,  G02F1/01

CPC classification number: G01N21/9505

Abstract: A defect estimating apparatus includes a laser radiating unit For obliquely radiating laser light on a surface to be observed of an object to be inspected, an observing unit for observing, through the surface to be observed, scattered light produced From internal defects or particles of the object by refracted light of the laser light, and observing scattered light or reflected light produced from flaws or particles on the surface by tile laser light, and a component separating unit for allowing the observing unit to perform observation by using both light containing primarily a p-polarized light component of the laser light and light containing primarily an s-polarized light component of the laser light.

Abstract translation: 缺陷估计装置包括：激光照射单元，用于在要被检测物体观察的表面上倾斜地照射激光;观察单元，用于通过观察表面观察从内部缺陷或 并且通过瓦片激光观察由表面上的缺陷或颗粒产生的散射光或反射光;以及分量分离单元，用于允许观察单元通过使用主要包含p的两个光来进行观察 激光的偏振光分量和主要包含激光的s偏振光分量的光。

公开(公告)号：US3952458A

公开(公告)日：1976-04-27

申请号：US488998

申请日：1974-07-16

Applicant: Tamaki Tomita ,  Mineo Ishikawa ,  Hayashi Kodama ,  Kazuo Moriya

Inventor： Tamaki Tomita ,  Mineo Ishikawa ,  Hayashi Kodama ,  Kazuo Moriya

IPC: B23Q15/14 ,  B23Q15/22 ,  B24B5/04 ,  B24B47/20 ,  B24B49/00 ,  B24B49/08

CPC classification number: B24B47/20 ,  B23Q15/225

Abstract: A grinding machine provided with an apparatus for changing a feed rate of a grinding wheel relative to a workpiece just before the grinding wheel comes into contact with the workpiece. An electrode device is mounted adjacent to the grinding wheel and connected to an electric power source for applying a potential to the surface of the grinding wheel. A detecting device detects a difference of potential between the grinding wheel and the workpiece to generate an output voltage. A memory device memorizes the output voltage detected when the grinding wheel is distant from the workpiece. A setting device reduces the memorized output voltage at a predetermined rate to provide a reference voltage corresponding to a predetermined gap between the grinding wheel and the workpiece. A comparator circuit compares the output voltage with the reference voltage to generate a feed rate changing signal when the output voltage attains the reference voltage. A control device controls a feed device so as to change the feed rate of a wheel slide in accordance with the feed rate changing signal.

Abstract translation: 一种研磨机，其具有用于在砂轮与工件接触之前更改砂轮相对于工件的进给速度的装置。 电极装置安装在砂轮附近，并连接到用于向砂轮表面施加电位的电源。 检测装置检测砂轮和工件之间的电位差以产生输出电压。 存储器件存储当砂轮远离工件时检测到的输出电压。 设置装置以预定的速率减小存储的输出电压，以提供对应于砂轮和工件之间的预定间隙的参考电压。 当输出电压达到参考电压时，比较器电路将输出电压与参考电压进行比较，以产生进给速率改变信号。 控制装置控制进给装置，以便根据进给速率改变信号改变车轮滑块的进给速率。

公开(公告)号：US5801827A

公开(公告)日：1998-09-01

申请号：US851291

申请日：1997-05-05

Applicant: Kazuo Moriya ,  Yasushi Terui ,  Hayato Tobe ,  Yoshisada Ebata ,  Hisashi Kimoto

Inventor： Kazuo Moriya ,  Yasushi Terui ,  Hayato Tobe ,  Yoshisada Ebata ,  Hisashi Kimoto

IPC: G01N21/31 ,  G01N21/72

CPC classification number: G01N21/72

Abstract: In an analysis device, an auxiliary gas supplied from a compressor 1 is introduced from an auxiliary gas inlet 3 via a pipe 2 to a burner through a pressure regulator 5, a pressur meter 6, a pressure switch 7 and a connecting joint 8. On the other hand, a combustible gas supplied from a gas bomb 9 is introduced from a combustible gas inlet 11 via a pipe 10 to the burner through a first electromagnetic valve 12, a pressure regulator 13, a pressure meter 14, a needle valve 15, a second electromagnetic valve 16 and a connecting joint 17 and further via a tube. An auxiliary gas use block 4, on which auxiliary gas flow controlling elements such as the pressure regulator 5, the pressure meter 6 and the pressure switch 7 are secured, is provided independent and separated from a combustible gas use block 18, on which combustible gas flow controlling elements such as the first electromagnetic valve 12, the pressure regulator 13, the pressure meter 14, the needle valve 15 and the second electromagnetic valve 16 are secured. Whereby the analysis device using chemical combustion flame having an element safety is provided in which possible danger caused by such as the gas leakage and the gas mixing between the combustible gas passage and the auxiliary gas passage is further reduced.

Abstract translation: 在分析装置中，从压缩机1供给的辅助气体通过压力调节器5，压力计6，压力开关7以及连接接头8，从辅助气体入口3经管道2引入燃烧器。 另一方面，从燃气弹9供应的可燃气体经由管道10从可燃气体入口11通过第一电磁阀12，压力调节器13，压力计14，针阀15， 第二电磁阀16和连接接头17，并且还经由管。 辅助气体使用块4，其上固定有诸如压力调节器5，压力表6和压力开关7等辅助气体流量控制元件，与可燃气体使用块18独立地分离并且与可燃气体使用块18分离， 确保了诸如第一电磁阀12，压力调节器13，压力计14，针阀15和第二电磁阀16之类的流量控制元件。 由此，提供了使用具有元件安全性的化学燃烧火焰的分析装置，其中进一步降低了由可燃气体通道和辅助气体通道之间的气体泄漏和气体混合引起的可能的危险。

公开(公告)号：US5786887A

公开(公告)日：1998-07-28

申请号：US708484

申请日：1996-09-05

Applicant: Yoshisada Ebata ,  Kazuo Moriya ,  Hisashi Kimoto ,  Hayato Tobe ,  Yasushi Terui

Inventor： Yoshisada Ebata ,  Kazuo Moriya ,  Hisashi Kimoto ,  Hayato Tobe ,  Yasushi Terui

IPC: G01N21/31 ,  G01N21/71 ,  B01N21/00

CPC classification number: G01N21/71 ,  G01N21/3103

Abstract: A light beam emitted by a hollow cathode lamp is concentrated on a central portion of an electrothermal sample atomizing apparatus by a concave mirror. The light concentrated on the central portion of the electrothermal sample atomizing apparatus is further concentrated on a central portion of a flame produced in a burner type sample atomizing apparatus by a lens. The light traveled through the burner type sample atomizing apparatus is condensed by a concave mirror, reflected by a flat mirror, and concentrated on an entrance slit of a spectroscope. Light outgoing through an exit slit of the spectroscope is detected by a photodetector.

Abstract translation: 由中空阴极灯发射的光束通过凹面镜集中在电热样品雾化装置的中心部分上。 集中在电热式雾化装置的中心部分的光进一步集中在通过透镜在燃烧器型样品雾化装置中产生的火焰的中心部分上。 通过燃烧器型样品雾化装置行进的光由凹面镜冷凝，由平面镜反射，并集中在分光镜的入口狭缝上。 通过光电检测器检测出通过光谱仪的出口狭缝的光。

公开(公告)号：US5471298A

公开(公告)日：1995-11-28

申请号：US36986

申请日：1993-03-25

Applicant: Kazuo Moriya

Inventor： Kazuo Moriya

IPC: G01N15/02 ,  G01N15/14 ,  G01N21/47 ,  G01N21/84 ,  G01N21/88 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66 ,  G01N21/53

CPC classification number: G01N15/0205 ,  G01N2015/0238 ,  G01N2021/1772 ,  G01N2021/4726 ,  G01N2021/4792 ,  G01N2021/8477 ,  G01N21/95

Abstract: A size of particle or defect in an object is measured. A laser beam is guided through an optical system into the object. A light receiving element receives scattered light from a particle or a defect in the object. A scattering image is formed by an image processor from the scattered light thus received. The size of particle or defect is obtained by integrating a scattering intensity of the scattered light. Also, a size distribution of particle or defect in an object may be acquired by detecting a maximum scattering intensity of each particle or defect. A polarization dependency of scattering may be checked as well.

Abstract translation: 测量物体中的颗粒或缺陷的尺寸。 将激光束通过光学系统引导到物体中。 光接收元件从物体中的颗粒或缺陷接收散射光。 散射图像由图像处理器从这样接收的散射光形成。 颗粒或缺陷的大小通过对散射光的散射强度进行积分而获得。 此外，可以通过检测每个颗粒或缺陷的最大散射强度来获得物体中的颗粒或缺陷的尺寸分布。 也可以检查散射的极化依赖性。

公开(公告)号：US5196716A

公开(公告)日：1993-03-23

申请号：US702087

申请日：1991-05-17

Applicant: Kazuo Moriya ,  Hideo Wada ,  Katsuyuki Hirai

Inventor： Kazuo Moriya ,  Hideo Wada ,  Katsuyuki Hirai

IPC: G01N21/88 ,  G01N21/00 ,  G01N21/35 ,  G01N21/3563 ,  G01N21/359 ,  G01N21/39 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66

CPC classification number: G01N21/9505 ,  G01N2021/1782 ,  G01N2021/393 ,  G01N2021/4735 ,  G01N2021/8887 ,  G01N2021/8896 ,  G01N2201/102

Abstract: A method for measuring internal defects of a specimen, comprising the steps of allowing a finely focused laser beam to be incident into a specimen from its surface and observing the scattered light of the said laser beam from inside the said specimen from the surface of the specimen and in a different direction to the optical axis of incidence of the laser beam.

公开(公告)号：US5106189A

公开(公告)日：1992-04-21

申请号：US669513

申请日：1991-03-14

Applicant: Kazuo Moriya ,  Susumu Taira

Inventor： Kazuo Moriya ,  Susumu Taira

IPC: G01N21/31 ,  G01N21/71 ,  H01F7/02

CPC classification number: G01N21/3103 ,  H01F7/0205 ,  G01N2021/3111 ,  G01N21/714

Abstract: A Zeeman atomic spectrophotometer comprising a sample heating means for atomizing a sample, a means for applying a magnetic flux to the atomized sample and a ceramic film coated on at least tips of pole pieces which are disposed facing the heated sample. As the tips of the pole pieces are coated with a ceramic film, the measuring accuracy of the Zeeman atomic absorption spectrophotometer becomes high and stable over a very long term.

Abstract translation: 一种塞曼原子分光光度计，其包括用于使样品雾化的样品加热装置，用于向雾化样品施加磁通量的装置和涂覆在至少面向加热样品的极片顶端的陶瓷膜。 由于极片的尖端涂覆有陶瓷膜，因此塞曼原子吸收分光光度计的测量精度在很长的一段时间内变得高稳定。