发明授权
- 专利标题: Process for the fabrication of aluminum metallized pyrolytic graphite sputtering targets
- 专利标题(中): 制造铝金属化热解石墨溅射靶的工艺
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申请号: US42704申请日: 1993-04-05
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公开(公告)号: US5428882A公开(公告)日: 1995-07-04
- 发明人: Daniel M. Makowiecki , Philip B. Ramsey , Robert S. Juntz
- 申请人: Daniel M. Makowiecki , Philip B. Ramsey , Robert S. Juntz
- 申请人地址: CA Oakland
- 专利权人: The Regents of the University of California
- 当前专利权人: The Regents of the University of California
- 当前专利权人地址: CA Oakland
- 主分类号: C23C14/18
- IPC分类号: C23C14/18 ; C23C14/34 ; B22D19/00
摘要:
An improved method for fabricating pyrolytic graphite sputtering targets with superior heat transfer ability, longer life, and maximum energy transmission. Anisotropic pyrolytic graphite is contoured and/or segmented to match the erosion profile of the sputter target and then oriented such that the graphite's high thermal conductivity planes are in maximum contact with a thermally conductive metal backing. The graphite contact surface is metallized, using high rate physical vapor deposition (HRPVD), with an aluminum coating and the thermally conductive metal backing is joined to the metallized graphite target by one of four low-temperature bonding methods; liquid-metal casting, powder metallurgy compaction, eutectic brazing, and laser welding.
公开/授权文献
- US6050926A Hand base for push-ups 公开/授权日:2000-04-18
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