发明授权
US5443865A Method for conditioning a substrate for subsequent electroless metal
deposition
失效
用于调理用于随后的无电金属沉积的衬底的方法
- 专利标题: Method for conditioning a substrate for subsequent electroless metal deposition
- 专利标题(中): 用于调理用于随后的无电金属沉积的衬底的方法
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申请号: US859594申请日: 1992-03-23
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公开(公告)号: US5443865A公开(公告)日: 1995-08-22
- 发明人: Stephen L. Tisdale , Alfred Viehbeck
- 申请人: Stephen L. Tisdale , Alfred Viehbeck
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: C23C18/18
- IPC分类号: C23C18/18 ; C23C18/20 ; B05D1/00
摘要:
Substrates are activated for subsequent metallization by contacting the substrate with a electrolyte in which reducing agents which are electrochemically generated in the electrolyte. The reducing agents are sorbed by the substrate which is contacted with a seeding medium to dispose on the substrate seed, preferably palladium seed for subsequent electroless and electrolytic metallization.
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