发明授权
US5445025A Angular velocity sensor having a balanced tuning fork structure and the method of manufacture 失效
具有平衡音叉结构的角速度传感器及其制造方法

Angular velocity sensor having a balanced tuning fork structure and the
method of manufacture
摘要:
An angular velocity sensor having a tuning-fork structure comprising a first vibrator including a first actuator and a first detector each attached to a metal plate and joined orthogonally to each other, and a second vibrator including a second actuator and a second detector each attached to another metal plate and joined orthogonally to each other, the two vibrators being coupled by an electrode block to each other in a generally parallel relationship along the axis of detection of the sensor. The first and second detectors have a rectangular plate shape each holding a piezoelectric element. The rectangular plate shape has a lengthwise edge and a widthwise edge where the lengthwise edge parallel to the axis of detection of the sensor and is longer than the width wise edge. At least one of the lengthwise edges of the detectors has a beveled surface formed by removing metal at an angle from the lengthwise edge of the detector to balance the sensor.
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