发明授权
- 专利标题: Angular velocity sensor having a balanced tuning fork structure and the method of manufacture
- 专利标题(中): 具有平衡音叉结构的角速度传感器及其制造方法
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申请号: US92354申请日: 1993-07-15
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公开(公告)号: US5445025A公开(公告)日: 1995-08-29
- 发明人: Jiro Terada , Hiroshi Takenaka , Masaharu Ushihara , Masami Tamura , Hitoshi Nishimura , Kikuo Kaino
- 申请人: Jiro Terada , Hiroshi Takenaka , Masaharu Ushihara , Masami Tamura , Hitoshi Nishimura , Kikuo Kaino
- 申请人地址: JPX Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX5-016054 19930203; JPX5-016122 19930203
- 主分类号: G01C19/56
- IPC分类号: G01C19/56 ; G01P9/04
摘要:
An angular velocity sensor having a tuning-fork structure comprising a first vibrator including a first actuator and a first detector each attached to a metal plate and joined orthogonally to each other, and a second vibrator including a second actuator and a second detector each attached to another metal plate and joined orthogonally to each other, the two vibrators being coupled by an electrode block to each other in a generally parallel relationship along the axis of detection of the sensor. The first and second detectors have a rectangular plate shape each holding a piezoelectric element. The rectangular plate shape has a lengthwise edge and a widthwise edge where the lengthwise edge parallel to the axis of detection of the sensor and is longer than the width wise edge. At least one of the lengthwise edges of the detectors has a beveled surface formed by removing metal at an angle from the lengthwise edge of the detector to balance the sensor.
公开/授权文献
- USD422704S Surgical access port 公开/授权日:2000-04-11
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