发明授权
US5450238A Four-layer antireflection coating for deposition in in-like DC
sputtering apparatus
失效
用于在类似DC溅射装置中沉积的四层抗反射涂层
- 专利标题: Four-layer antireflection coating for deposition in in-like DC sputtering apparatus
- 专利标题(中): 用于在类似DC溅射装置中沉积的四层抗反射涂层
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申请号: US165438申请日: 1993-12-10
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公开(公告)号: US5450238A公开(公告)日: 1995-09-12
- 发明人: Erik J. Bjornard , Debra M. Steffenhagen , Eric R. Dickey
- 申请人: Erik J. Bjornard , Debra M. Steffenhagen , Eric R. Dickey
- 申请人地址: MN Faribault
- 专利权人: Viratec Thin Films, Inc.
- 当前专利权人: Viratec Thin Films, Inc.
- 当前专利权人地址: MN Faribault
- 主分类号: C03C17/34
- IPC分类号: C03C17/34 ; G02B1/11 ; G02B5/28
摘要:
An antireflection coating for a substrate including four layers and having optimized photopic reflectance and optimized for deposition by sputtering. The first layer (the layer farthest from the substrate) has a refractive index less than the refractive index of the substrate and a thickness of about one-quarter wavelength. The second layer (the layer adjacent the first layer) has an refractive index greater than about 2.2 and a thickness of about a half wavelength. The third layer has refractive index less than that of the second layer. The fourth layer (the layer adjacent the substrate) has a refractive index less than about 2.0 and greater than that of the third layer. The combined thickness of the third and fourth layers is less than about a quarter wavelength. The first and third layers may include silicon dioxide. The second layer may include titanium dioxide or niobium oxide. The fourth layer may include indium oxide, tin oxide, indium tin oxide, or zinc oxide.
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