Invention Grant
- Patent Title: Semiconductor sensors and method for fabricating the same
- Patent Title (中): 半导体传感器及其制造方法
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Application No.: US988928Application Date: 1993-03-15
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Publication No.: US5453727APublication Date: 1995-09-26
- Inventor: Ichiro Shibasaki , Naohiro Kuze , Tatsuro Iwabuchi , Kazuhiro Nagase
- Applicant: Ichiro Shibasaki , Naohiro Kuze , Tatsuro Iwabuchi , Kazuhiro Nagase
- Applicant Address: JPX Osaka
- Assignee: Asahi Kasai Kogyo Kabushiki Kaisha
- Current Assignee: Asahi Kasai Kogyo Kabushiki Kaisha
- Current Assignee Address: JPX Osaka
- Priority: JPX3-175349 19910716
- Main IPC: H01L31/0304
- IPC: H01L31/0304 ; H01L43/06 ; H01L43/00
Abstract:
The present invention is a method of fabrication of a thin film of In.sub.x Ga.sub.1-x As.sub.y Sb.sub.1-y (0
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