发明授权
- 专利标题： Guard ring electrostatic chuck
- 专利标题（中）： 防护环静电卡盘
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申请号： US169932申请日： 1993-12-20
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公开(公告)号： US5463525A公开(公告)日： 1995-10-31
- 发明人: Michael S. Barnes , John H. Keller , Joseph S. Logan , Robert E. Tompkins , Robert P. Westerfield, Jr.
- 申请人： Michael S. Barnes , John H. Keller , Joseph S. Logan , Robert E. Tompkins , Robert P. Westerfield, Jr.
- 申请人地址： NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： NY Armonk
- 主分类号： B23Q3/15
- IPC分类号： B23Q3/15 ; H01L21/68 ; H01L21/683 ; H02N13/00
摘要：
An electrostatic chuck suppresses the formation of vacuum arcs between the back of the wafer being processed and the body of the chuck by the interposition of a guard ring that floats close to the self-bias potential induced by the plasma on the wafer, thereby capacitively dividing the voltage between the wafer and the closest electrode.
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