发明授权
- 专利标题: Double reflection cathodoluminescence detector with extremely high discrimination against backscattered electrons
- 专利标题(中): 双反射阴极发光检测器具有极高的背散射电子差异
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申请号: US295048申请日: 1994-08-26
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公开(公告)号: US5468967A公开(公告)日: 1995-11-21
- 发明人: Daniel S. H. Chan , Kin Leong , Jacob C. H. Phang
- 申请人: Daniel S. H. Chan , Kin Leong , Jacob C. H. Phang
- 申请人地址: SGX
- 专利权人: National University of Singapore
- 当前专利权人: National University of Singapore
- 当前专利权人地址: SGX
- 主分类号: G01Q60/00
- IPC分类号: G01Q60/00 ; H01J37/244
摘要:
A parabolic reflector and an inclined planar light reflector in a cathodoluminescence detector are integrated with a set of photo-sensitive solid-state detector cells mounted in quadrature on a supporting plate, and supported by an electron microscope vacuum chamber specimen stage adaptor unit. Designed for CL emission operation in an electron microscope, the parabolic light reflector, the inclined planar light reflector and the photo-sensitive, solid-state detector cells are optically aligned and mechanically combined through the supporting plate of the detector cells. A readily exchangeable unit is thus obtained. The unit is further supported by the specimen stage adaptor unit so as to obtain a mechanical unit which can easily be mounted in and removed from any standard electron microscope vacuum chamber stage as a single integrated unit.
公开/授权文献
- US5187270A Racemization free attachment of amino acids to a solid phase 公开/授权日:1993-02-16
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