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1.发明授权Pulsed single contact optical beam induced current analysis of integrated circuits 有权脉冲单接触光束感应电流分析集成电路公开(公告)号：US06556029B1
公开(公告)日：2003-04-29
申请号：US09630252
申请日：2000-08-01
IPC分类号： G01R31305
CPC分类号： G01R31/311
摘要： An improved method of performing optical beam induced current imaging of semiconductor junctions. According to the method, a single wired contact to an integrated circuit (for example through use of a conventional conductive probe) is made at a point that makes electrical contact to a first side of a junction to be analyzed. A first line connects the wired contact to an amplifier, and a second line carries return current from the amplifier to a ground connection. A capacitive return connection is then used to couple return current from a second side of the junction to ground. The actual value of capacitance in the return connection is not of fundamental importance in the practice of the invention, but generally larger capacitance values are preferred and allow increased induced current flow. An increase in the optical beam power also results in more induced current being generated. This causes a faster decay and results in a better signal-to-noise ratio at a higher scanning beam rate. With the connections described above to the amplifier and the processing circuitry, a pulsed particle or optical beam is applied to the junction. In response to the pulsed beam, the junction generates a corresponding pulse of induced current. Since the current in response to the pulsed beam has an alternating current component, it passes through the capacitive junction return connection as well as through the single wired contact to the amplifier. The amplifier outputs a magnified replica of the current which is then analyzed by the processing circuit to provide a useful form of data for analysis of the junction.
摘要翻译： 执行半导体结的光束感应电流成像的改进方法。 根据该方法，在与要分析的结的第一侧电接触的点处，形成与集成电路（例如通过使用常规导电探针）的单个有线接触。 第一线将有线触点连接到放大器，第二行将放大器的返回电流传送到接地连接。 然后使用电容性返回连接来将返回电流从接头的第二侧耦合到地。 返回连接中的电容的实际值在本发明的实践中不是至关重要的，但是通常较大的电容值是优选的并且允许增加的感应电流。 光束功率的增加也导致产生更多的感应电流。 这导致更快的衰减并且在更高的扫描光束速率下导致更好的信噪比。 利用上述连接到放大器和处理电路，脉冲粒子或光束被施加到接合点。 响应于脉冲光束，结点产生相应的感应电流脉冲。 由于响应于脉冲光束的电流具有交流分量，所以它通过电容结返回连接以及通过单个有线接触到放大器。 放大器输出电流的放大副本，然后由处理电路分析电流，以提供用于分析结的有用形式的数据。
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2.发明授权
公开(公告)号：US5264704A
公开(公告)日：1993-11-23
申请号：US977840
申请日：1992-11-17
申请人： Jacob C. H. Phang , Daniel S. H. Chan , Kin L. Pey
发明人： Jacob C. H. Phang , Daniel S. H. Chan , Kin L. Pey
IPC分类号： G01Q30/20 , H01J37/20 , H01J37/244
CPC分类号： H01J37/228 , H01J37/244 , H01J2237/2808
摘要： A parabolic light reflection device in a cathodoluminescence (CL) apparatus is integrated with a photosensitive solid state device mounted on a supporting plate, and supported in an electron microscope vacuum chamber specimen stage by an adaptor element. These components are optically aligned with respect to one another and a readily exchangeable unit is thus obtained. Designed for CL emission operation in an electron microscope, the parabolic light reflection device and the photosensitive solid state detection device are optically aligned and then mounted on a supporting plate of the photosensitive solid state device. The unit thus configured is supported by the specimen stage adaptor element to obtain a mechanical element which can be easily inserted in and removed from any standard electron microscope vacuum chamber stage as a single integrated unit.
摘要翻译： 阴极发光（CL）装置中的抛物面光反射装置与安装在支撑板上的光敏固体装置集成，并通过适配器元件支撑在电子显微镜真空室样品台中。 这些组分相对于光学对准，因此获得易于更换的单元。 专为电子显微镜中的CL发射操作而设计，抛光光反射装置和光敏固态检测装置被光学对准，然后安装在光敏固态装置的支撑板上。 这样构成的单元由样本台适配器元件支撑，以获得能够容易地插入任何标准电子显微镜真空室的单元和单个集成单元中的机械元件。
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3.再颁专利Rotational stage for high speed, large area scanning in focused beam systems 有权旋转舞台用于高速，大面积扫描聚焦光束系统公开(公告)号：USRE43757E1
公开(公告)日：2012-10-23
申请号：US11824466
申请日：2007-06-28
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/20228
摘要： A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear motion. A second stage, above the first stage, provides rotational positioning. A third stage above the rotational stage is moveable in a first linear direction, and the fourth stage above the third stage is positionable in a second linear direction orthogonal to the first direction. The four stages are responsive to input from a controller programmed with a polar coordinate pixel addressing method, for positioning a specimen mounted on the mechanical stage to allow an applied static focus beam to irradiate selected areas of interest, thereby imaged by collecting signals from the specimen using a polar coordinate pixel addressing method.
摘要翻译： 一种用于聚焦光束系统中高速图像采集的机械扫描阶段。 机械扫描阶段优选地是四个阶段的组合。 第一阶段提供线性运动。 在第一阶段以上的第二阶段提供旋转定位。 旋转台上方的第三级可在第一线性方向上移动，并且第三级以上的第四级可在与第一方向正交的第二线性方向上定位。 四个阶段响应来自用极坐标像素寻址方法编程的控制器的输入，用于定位安装在机械平台上的样本，以允许施加的静态聚焦光束照射所选择的感兴趣区域，从而通过收集来自样本的信号 使用极坐标像素寻址方法。
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4.发明授权Rotational stage for high speed, large area scanning in focused beam systems 有权旋转舞台用于高速，大面积扫描聚焦光束系统公开(公告)号：US06911656B2
公开(公告)日：2005-06-28
申请号：US10884698
申请日：2004-07-01
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/20228
摘要： A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear motion. A second stage, above the first stage, provides rotational positioning. A third stage above the rotational stage is moveable in a first linear direction, and the fourth stage above the third stage is positionable in a second linear direction orthogonal to the first direction. The four stages are responsive to input from a controller programmed with a polar coordinate pixel addressing method, for positioning a specimen mounted on the mechanical stage to allow an applied static focus beam to irradiate selected areas of interest, thereby imaged by collecting signals from the specimen using a polar coordinate pixel addressing method.
摘要翻译： 一种用于聚焦光束系统中高速图像采集的机械扫描阶段。 机械扫描阶段优选地是四个阶段的组合。 第一阶段提供线性运动。 在第一阶段以上的第二阶段提供旋转定位。 旋转台上方的第三级可在第一线性方向上移动，并且第三级以上的第四级可在与第一方向正交的第二线性方向上定位。 四个阶段响应来自用极坐标像素寻址方法编程的控制器的输入，用于定位安装在机械平台上的样本，以允许施加的静态聚焦光束照射所选择的感兴趣区域，从而通过收集来自样本的信号 使用极坐标像素寻址方法。
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5.发明授权Rotational stage for high speed, large area scanning in focused beam systems 失效旋转舞台用于高速，大面积扫描聚焦光束系统公开(公告)号：US06777688B2
公开(公告)日：2004-08-17
申请号：US10245865
申请日：2002-09-16
IPC分类号： H01J3720
CPC分类号： H01J37/20 , H01J2237/20214 , H01J2237/20228
摘要： A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear motion. A second stage, above the first stage, provides rotational positioning. A third stage above the rotational stage is moveable in a first linear direction, and the fourth stage above the third stage is positionable in a second linear direction orthogonal to the first direction. The four stages are responsive to input from a controller programmed with a polar coordinate pixel addressing method, for positioning a specimen mounted on the mechanical stage to allow an applied static focus beam to irradiate selected areas of interest, thereby imaged by collecting signals from the specimen using a polar coordinate pixel addressing method.
摘要翻译： 一种用于聚焦光束系统中高速图像采集的机械扫描阶段。 机械扫描阶段优选地是四个阶段的组合。 第一阶段提供线性运动。 在第一阶段以上的第二阶段提供旋转定位。 旋转台上方的第三级可在第一线性方向上移动，并且第三级以上的第四级可在与第一方向正交的第二线性方向上定位。 四个阶段响应来自用极坐标像素寻址方法编程的控制器的输入，用于定位安装在机械平台上的样本，以允许施加的静态聚焦光束照射所选择的感兴趣区域，从而通过收集来自样本的信号 使用极坐标像素寻址方法。
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公开(公告)号：US5486769A
公开(公告)日：1996-01-23
申请号：US290527
申请日：1994-08-15
IPC分类号： G01Q30/02 , G01Q40/00 , G01R31/305 , G01R31/00
CPC分类号： G01R31/305 , H01J2237/2594
摘要： In a method and apparatus for measuring quantitative voltage contrast, an electron beam of the scanning electron microscope is located on a specimen electrode, and a grid voltage of an energy analyzer of the scanning electron microscope is varied. A detector detects secondary electron emission from the specimen electrode. A measured peak voltage of the specimen electrode is determined based on output from the detector. A specimen electrode voltage corrected for type I local field effect error is then obtained using the measured peak voltage and a type I calibration curve. The type I calibration curve represents peak voltage versus specimen electrode voltage. Type II local field effect error in the specimen electrode voltage is then corrected based on a type II calibration curve. The type II calibration curve represents a shift in specimen electrode peak voltage versus adjacent electrode voltage.
摘要翻译： 在用于测量定量电压对比度的方法和装置中，扫描电子显微镜的电子束位于样本电极上，扫描电子显微镜的能量分析仪的电网电压是变化的。 检测器检测来自样品电极的二次电子发射。 根据检测器的输出确定样品电极的测量峰值电压。 然后使用测量的峰值电压和I型校准曲线获得校正了I型局部场效应误差的样本电极电压。 I型校准曲线表示峰值电压对样品电极电压。 然后根据II型校准曲线校正样品电极电压中的II型局部场效应误差。 II型校准曲线表示样品电极峰值电压相对于相邻电极电压的偏移。
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7.发明授权
公开(公告)号：US5468967A
公开(公告)日：1995-11-21
申请号：US295048
申请日：1994-08-26
申请人： Daniel S. H. Chan , Kin Leong , Jacob C. H. Phang
发明人： Daniel S. H. Chan , Kin Leong , Jacob C. H. Phang
IPC分类号： G01Q60/00 , H01J37/244
CPC分类号： H01J37/228 , H01J37/244 , H01J2237/2445
摘要： A parabolic reflector and an inclined planar light reflector in a cathodoluminescence detector are integrated with a set of photo-sensitive solid-state detector cells mounted in quadrature on a supporting plate, and supported by an electron microscope vacuum chamber specimen stage adaptor unit. Designed for CL emission operation in an electron microscope, the parabolic light reflector, the inclined planar light reflector and the photo-sensitive, solid-state detector cells are optically aligned and mechanically combined through the supporting plate of the detector cells. A readily exchangeable unit is thus obtained. The unit is further supported by the specimen stage adaptor unit so as to obtain a mechanical unit which can easily be mounted in and removed from any standard electron microscope vacuum chamber stage as a single integrated unit.
摘要翻译： 阴极发光检测器中的抛物面反射器和倾斜平面光反射器与安装在支撑板上正交的一组光敏固态检测器单元集成，并由电子显微镜真空室样品台适配器单元支撑。 设计用于电子显微镜中的CL发射操作，抛物面光反射器，倾斜平面光反射器和光敏固态检测器单元通过检测器单元的支撑板进行光学对准和机械组合。 从而获得容易更换的单元。 该单元由样品台适配器单元进一步支撑，以获得可以容易地安装在任何标准电子显微镜真空室台中并从其移除的机械单元作为单个集成单元。
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