发明授权
US5471422A EEPROM cell with isolation transistor and methods for making and
operating the same
失效
具有隔离晶体管的EEPROM单元及其制造和操作的方法
- 专利标题: EEPROM cell with isolation transistor and methods for making and operating the same
- 专利标题(中): 具有隔离晶体管的EEPROM单元及其制造和操作的方法
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申请号: US225868申请日: 1994-04-11
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公开(公告)号: US5471422A公开(公告)日: 1995-11-28
- 发明人: Ko-Min Chang , Danny P. Shum , Kuo-Tung Chang
- 申请人: Ko-Min Chang , Danny P. Shum , Kuo-Tung Chang
- 申请人地址: IL Schaumburg
- 专利权人: Motorola, Inc.
- 当前专利权人: Motorola, Inc.
- 当前专利权人地址: IL Schaumburg
- 主分类号: G11C17/00
- IPC分类号: G11C17/00 ; G11C16/04 ; H01L21/8247 ; H01L27/115 ; H01L29/788 ; H01L29/792 ; G11C11/34 ; H01L29/68
摘要:
An EEPROM cell (40) includes a floating gate transistor (47) and an isolation transistor (45). Both a floating gate (48) and an isolation gate (46) are formed on a tunnel dielectric (44) within the cell. The isolation gate is coupled to a doped source region (52) of the floating gate transistor. The isolation transistor is not biased during a program operation of the cell, enabling a thin tunnel dielectric (less than 120 angstroms) to be used beneath all portions of both gates within the cell. Thus, the need for both a conventional tunnel dielectric and a gate dielectric is eliminated. The cell tolerates over-erasure, can be programmed at low programming voltages, and has good current drive due to the thin tunnel dielectric throughout the cell.
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