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US5473944A Seam pressure sensor employing dielectically isolated resonant beams and related method of manufacture 失效
采用介电隔离谐振光束的光束压力传感器及相关制造方法

Seam pressure sensor employing dielectically isolated resonant beams and related method of manufacture
摘要：
A pressure transducer comprising at least one diaphragm formed in a wafer of semiconducting material, the at least one diaphragm being spaced from a first surface of the wafer, a first layer of semiconducting material disposed over the at least one diaphragm, the first layer forming at least one resonating beam over the at least one diaphragm, and a plurality of resistor elements formed from a third layer of semiconducting material disposed over the at least one resonating beam, and isolation means for dielectrically isolating the at least one resonating beam from the at least one diaphragm.
摘要（中）：

一种压力传感器，包括形成在半导体材料晶片中的至少一个光阑，所述至少一个光阑与所述晶片的第一表面间隔开，设置在所述至少一个光阑上的第一层半导体材料，所述第一层形成在 在所述至少一个隔膜上的至少一个谐振束，以及由设置在所述至少一个谐振束上的第三层半导体材料形成的多个电阻元件，以及隔离装置，用于将所述至少一个谐振束与所述至少一个谐振束 一个隔膜

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