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US5480511A Method for contactless real-time in-situ monitoring of a chemical etching process 失效
化学蚀刻工艺无接触实时原位监测方法

Method for contactless real-time in-situ monitoring of a chemical
etching process
摘要:
A contactless method and apparatus for in-situ chemical etch monitoring of an etching process during etching of a workpiece with a wet chemical etchant are disclosed. The method comprises steps of providing at least two toroidal windings in the wet chemical etchant to be proximate to but not in contact with the workpiece; and monitoring an electrical characteristic between said at least two toroidal windings, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process. Such a method and apparatus are particularly useful in a wet chemical etch station.
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