发明授权
- 专利标题: Method for contactless real-time in-situ monitoring of a chemical etching process
- 专利标题(中): 化学蚀刻工艺无接触实时原位监测方法
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申请号: US269860申请日: 1994-06-30
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公开(公告)号: US5480511A公开(公告)日: 1996-01-02
- 发明人: Steven G. Barbee , Tony F. Heinz , Leping Li , Eugene H. Ratzlaff
- 申请人: Steven G. Barbee , Tony F. Heinz , Leping Li , Eugene H. Ratzlaff
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: C23F1/00
- IPC分类号: C23F1/00 ; C23F1/08 ; G01B7/06 ; G01N17/00 ; G01N27/02 ; H01L21/306 ; H01L21/66
摘要:
A contactless method and apparatus for in-situ chemical etch monitoring of an etching process during etching of a workpiece with a wet chemical etchant are disclosed. The method comprises steps of providing at least two toroidal windings in the wet chemical etchant to be proximate to but not in contact with the workpiece; and monitoring an electrical characteristic between said at least two toroidal windings, wherein a prescribed change in the electrical characteristic is indicative of a prescribed condition of the etching process. Such a method and apparatus are particularly useful in a wet chemical etch station.
公开/授权文献
- US4923107A Stapling machine 公开/授权日:1990-05-08
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