发明授权
- 专利标题： Method and apparatus for patterning an imaging member
- 专利标题（中）： 用于图案化成像构件的方法和装置
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申请号： US242926申请日： 1994-05-16
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公开(公告)号： US5482818A公开(公告)日： 1996-01-09
- 发明人: William E. Nelson
- 申请人： William E. Nelson
- 申请人地址： TX Dallas
- 专利权人： Texas Instruments Incorporated
- 当前专利权人： Texas Instruments Incorporated
- 当前专利权人地址： TX Dallas
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; H01L21/027 ; H01L21/30 ; H05K3/00
摘要：
A device for patterning an imaging member (46) is provided. The device comprises a light source (24) which emits light rays (26). Light rays (26) pass through a collimator lens (28) to collimate the light rays (30). The light then strikes a spatial light modulator (32) which is controlled by a computer (40) to reflect the light (42). The light passes through an imaging lens (44) to magnify the pattern for striking imaging member (46). Imaging member (46) is thus patterned by changing modulator (32) by computer (40).