发明授权
- 专利标题: High-temperature pressure sensor
- 专利标题(中): 高温压力传感器
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申请号: US251688申请日: 1994-05-31
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公开(公告)号: US5488868A公开(公告)日: 1996-02-06
- 发明人: Seiichirou Ootake , Kazuyoshi Nagase , Shinji Ozaki , Makoto Hatanaka
- 申请人: Seiichirou Ootake , Kazuyoshi Nagase , Shinji Ozaki , Makoto Hatanaka
- 专利权人: Nippondenso Co., Ltd.
- 当前专利权人: Nippondenso Co., Ltd.
- 优先权: JPX5-130279 19930601
- 主分类号: G01L9/08
- IPC分类号: G01L9/08 ; G01L7/08 ; G01L9/00 ; G01L19/04 ; G01L19/06 ; G01L23/10 ; G01L23/18
摘要:
A diaphragm portion 20 causes deflection, when high-temperature fluid pressure acts on the pressure sensing surface A of the diaphragm portion 20. This deflection is transmitted via pressure transmitting members 7, 8 to a deflection sensing member 6 which generates an electric signal in response to a pressure received.The diaphragm portion 20 has a recess portion 21 at its center. The recess portion 21 is symmetrical about a central axis of the diaphragm portion 20. A tip end of the pressure transmitting member 7 is brought into contact with the recess portion 21 at a central point. A tapered portion 2d of the diaphragm 20 has a thickness of t.sub.3 which is not larger than the thickness t.sub.1 of an outer peripheral portion 2b or t.sub.2 of a central bottom portion 2c. Furthermore, a heat insulating plate can be provided on the diaphragm to protect the surface A of the diaphragm portion from heat radiation of high-temperature fluid.
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