发明授权
- 专利标题： Multilayer antifuse with intermediate spacer layer
- 专利标题（中）： 多层反熔丝与中间隔层
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申请号： US250068申请日： 1994-05-27
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公开(公告)号： US5510629A公开(公告)日： 1996-04-23
- 发明人: Yakov Karpovich , Ali A. Iranmanesh
- 申请人： Yakov Karpovich , Ali A. Iranmanesh
- 申请人地址： CA Santa Clara
- 专利权人： Crosspoint Solutions, Inc.
- 当前专利权人： Crosspoint Solutions, Inc.
- 当前专利权人地址： CA Santa Clara
- 主分类号： H01L21/768
- IPC分类号： H01L21/768 ; H01L23/525 ; H01L29/04 ; H01L31/036
摘要：
A method and structure for an improved antifuse in an integrated circuit having a sacrificial layer under a programming layer which forces a conductive link upon programming to be formed away from corner regions of the via structures. The method includes the unique step of forming an improved aperture or via with sides through an inter dielectric layer where the antifuse is to be located. The improved aperture or via exposes a portion of a metal interconnection line through a portion of sacrificial layer located away from the inter dielectric layer sides. Such improved method of forming the antifuse also provides a superior antifuse structure.
公开/授权文献
- US4890607A Multiaxis controlled motion knee orthosis 公开/授权日：1990-01-02
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